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이온보조반응법에 의한 Polyethylene(PE) 표면의 친수성 증가
석진우(Jin-Woo Seok),최성창(Sung-Chang Choi),장홍규(Hong-Gui Jang),정형진(Hyung-Jin Jung),최원국(Won-Kook Choi),고석근(Seok-Keun Koh) 한국진공학회(ASCT) 1997 Applied Science and Convergence Technology Vol.6 No.3
고분자 Polyethylene(PE) film 표면을 1 keV의 산소 이온 빔만을 사용하여, 또는 산소 분위기에서 1 keV의 아르곤 이온 빔으로 조사하는 이온보조반응(ion assisted reaction)법을 이용하여 개질을 하였다. 개질된 polyethylene 표면의 친수성(wettability)과 표면 에너지를 측정하기 위해 접촉각 측정기(contact angle micrometer)를 사용하였으며, 개질 된 표면의 화학적 변화를 측정하기 위해 x-ray photoelectron spectroscopy(XPS)를 이용하였다. 표면 개질을 위한 이온 조사량은 1×10¹⁴-1×10^(17) ions/㎠, 산소 가스는 0~4 sccm(ml/min.) 까지 변화 시켰다. 산소 이온 빔만으로 조사 후 polyethylene 표면과 물과의 접촉각은 95˚에서 최대 62˚까지 변화하였으며, 산소를 4 sccm(ml/min.) 주입하면서 아르곤 이온 빔으로 조사하면 물과의 접촉각이 최대 28˚까지 감소하였으며, 이 때 이온 조사량은 1×10^(17) ions/㎠ 이었다. 또한 polyethylene을 산소 이온 빔으로만 표면 개질시 표면 에너지는 작은 증가를 보였으며, 산소 분위기에서 아르곤 이온 빔으로 표면 개질 하였을 때에는 표면 에너지가 2배에 가까운 증가를 하였다. 이와 같은 표면의 친수성과 표면 에너지의 증가는 이온보조반응법에 의해 polyethylene의 표면을 산소 분위기에서 아르곤 이온 빔으로 조사한 시료의 XPS의 spectra 결과로 보아 PE의 표면에 C-O 또는 C=O와 관련된 결합의 증가로 인한 친수성 작용기가 polyethylene 표면에 형성되었기 때문이라고 사료된다. Surface of polyethylene film was modified by ion assisted reaction in which ion beam is irradiated on polymer in reactive gas environments. Ion (argon and oxygen) beam energy was 1 keV, doses were varied from 1×10¹⁴-1×10^(17) ions/㎠, and amount of blowing oxygen from 0 to 4 sccm(ml/min). Wettability was measured by water contact angle measurement, and the surface functionality was analyzed by x-ray photoelectron spectroscopy. The contact angles of water to polyethylene modified by oxygen ion beam only decrease from 95 to degrees, and surface energy was not changed much. The contact angles remarkably decrease to 28 degrees and surface energy increase to 67 erg/㎠ when the films were modified by argon ion with various ion doses with blowing oxygen gases near the polyethylene surface. Improvement of wettability and surface energy are mainly due to the new functional group formation such as C-O or C=O, which are known as hydrophilic groups from the XPS analysis, and the ion assisted reaction is very effective to attach oxygen atoms to form functional groups on C-C bond chains of polyethylene.
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부분 이온빔 증착법으로 제작한 Silicon(100) 기판위의 구리 박막
장홍규,김기환,최성창,최두진,최원국,손용배,고석근,정형진 한국마이크로전자및패키징학회 1996 하이브리드마이크로일렉트로닉스 Vol.3 No.2
Cu films with a thickness around 1800 Å were prepared on Si(100) at room temperature by partially ionized beam deposition (PIBD) at pressure of 8x10^7 -l × l0^6 Torr. Effects of acceleration voltage (Va) between 0 and 4 kV on such properties as crystallinity, surface roughness, resistivity, etc. of the films have been investigated. The Cu films grown by PIBD have only (111) and (200) planes and the relative intensity ratio, I (111) /I (200), of the films increased from 6.8 at V_a=0kV to 37 at V_a=4 kV. A large increase in grain size of the films at the ionization potential of 400V decreased with Va, and resistivity had the same trends as that of the surface roughness. In Cu films made by PIBD, it is considered that changes of resistivity are mainly due to a surface scattering. Adhesion of Cu film on Si (100) deposited at V_a=3kV is 5 times greater than that of Cu film deposited at V_a=0kV, as determined by a scratch test. The Cu films made at V_a=4kV were filled without void into via hole with a diameter of 0.5 ㎛, and a depth of 1.5㎛.
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반응성 가스 분위기하에서 이온빔을 이용한 폴리머 표면의 친수성 증대 및 세라믹표면개질
최원국,손용배,장홍규,정형진,고석근 한국마이크로전자및패키징학회 1996 하이브리드마이크로일렉트로닉스 Vol.3 No.1
Wettability of polymeric surfaces (PC, PET, PMMA, and PTFE) to triple distilled water are improved by Ar^+ ion irradiation in various reactive gases (H₂, O₂and N₂) partial pressure. The wettability of the polymers are changed with Ar^+ ion dose from 10^(14) to 1 ×10^(17) ions /㎠ and with various reactive gas environments. The ability of wetting angle reduction was the same as the reactivity of the gases (O₂$gt; N₂$gt; H₂) which were introduced near the irradiating polymer surfaces. The formation of hydrophilic group on the polymer surface is confirmed by analyses of C1s, O1s and N1s XPS spectra. Adhesion between A1 metal and modified polymeric surfaces of PC and PTFE is greatly improved and was tested by a Scotch tape test and by tensile test. The enhancement of wettability is proved to be caused by increase of polar force in surface energy. Reaction mechanism among the energetic Ar^+ ions, polymer chains, and reactive gases are discussed by two-step reaction in which the first step is a formation of activated unstable polymer chains by ion irradiation and the second is a reaction between activated unstable polymer chains and reactive gases. The surface of AlN is irradiated with Ar^+ ion in oxygen environment. Newly formed AION layer is identified by XPS depth profiling. Adhesion between Cu and ion beam modified AlN has been examined by a scratch test.
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