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심종수 ( Jong-soo Sim ),박주호 ( Ju-ho Park ),성동윤 ( Dong-yoon Sung ),이장후 ( Jang Hoo Lee ),김효철 ( Hyo Chul Kim ),박승범 ( Sungbum Park ),배병성 ( Byung Seong Bae ) 한국정보처리학회 2023 한국정보처리학회 학술대회논문집 Vol.30 No.2
반도체 공정은 주로 진공 중에서 이루어 지며 진공을 잘 유지하는 것이 매우 중요하고 여러 가지 종류의 펌프가 사용이 된다. 저진공펌프로 많이 사용되는 로타리 펌프에 대해서 진동 및 온도센서를 부착하고 펌프의 상태에 따른 진동의 변화 및 온도의 변화를 연구 하고 펌프의 예지 보전에 활용할 수 있도록 하였다.
a-IGZO TFT 기반 OLED 디스플레이 화소에 내장되는 OLED 열화 보상용 온도 센서의 개발
문승재 ( Seung Jae Moon ),김승균 ( Seong Gyun Kim ),최세용 ( Se Yong Choi ),이장후 ( Jang Hoo Lee ),이종모 ( Jong Mo Lee ),배병성 ( Byung Seong Bae ) 한국센서학회 2024 센서학회지 Vol.33 No.1
The quality of the display can be managed by effectively managing the temperature generated by the panel during use. Conventional display panels rely on an external reference resistor for temperature monitoring. However, this approach is easily affected by external factors such as temperature variations from the driving circuit and chips. These variations reduce reliability, causing complicated mounting owing to the external chip, and cannot monitor the individual pixel temperatures. However, this issue can be simply and efficiently addressed by integrating temperature sensors during the display panel manufacturing process. In this study, we fabricated and analyzed a temperature sensor integrated into an a-IGZO (amorphous indium-gallium-zinc-oxide) TFT array that was to precisely monitor temperature and prevent the deterioration of OLED display pixels. The temperature sensor was positioned on top of the oxide TFT. Simultaneously, it worked as a light shield layer, contributing to the reliability of the oxide. The characteristics of the array with integrated temperature sensors were measured and analyzed while adjusting the temperature in real-time. By integrating a temperature sensor into the TFT array, monitoring the temperature of the display became easier and more accurate. This study could contribute to managing the lifetime of the display.