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회귀적 완전 최소 자승법을 이용한 헤테로다인 레이저 간섭계의 비선형 오차보정
유영욱(Younguk Yoo),이상철(Sangchul Lee),유관호(Kwanho You) 대한전기학회 2009 정보 및 제어 심포지엄 논문집 Vol.2009 No.10
The heterodyne laser interferometer has been widely used in linear displacement and precise measurement field. However the periodic nonlinearity that arises from incomplete laser sources and nonideal optical components restricts the precise measurement at the nano-meter level. In this pa야,r the recursive total least squares (RTLS) algorithm which can obtain optimal compensation parameters of nonlinearity is introduced. Using the RTLS algorithm, the nonlinearity error is reduced and the measurement data can be more stabilized. The effectiveness of RTLS approach is verified through the comparison of the experimental results with those obtained by a capacitance displacement sensor.