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오해관,윤성진,이기근,왕웬,양상식,Oh, Hae-Kwan,Yun, Sung-Jin,Lee, Kee-Keun,Wang, Wen,Yang, Sang-Sik 한국군사과학기술학회 2009 한국군사과학기술학회지 Vol.12 No.1
This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{\circ}\;YX\;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{\cdot}s^{-1}$ in the angular rate range of $0{\sim}1000deg/s$. Good Linearity and superior directivity were observed.
무전지 SAW 기반 마이크로 통합센서 및 무선 측정기술 개발
吳海寬(Hae-Kwan Oh),金泰?(Tae-Hyun Kim),李基根(Kee-Keun Lee),王文(Wen Wang),梁翔植(Sang-Sik Yang) 대한전기학회 2007 전기학회논문지 Vol.56 No.8
We developed a 440㎒ surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ill tag. Two piezoelectric substrates were bonded, in which ~150 ㎛ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high SIN ratio, small signal attenuation, and small spurious peaks were observed. Ail the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10㎽ RF power from the network analyzer, a ~1 meter readout distance was observed. Eight sharp ON reflection peaks were observed for ill tag. Temperature sensor was characterized from 20℃ to 200℃. A large phase shift per unit temperature change was observed. The evaluated sensitivity was ~10 °/℃.
오해관(Hae-Kwan Oh),황우진(黃禹珍),은경태(Kyung-Tae Eun),좌성훈(Sung-Hun Choa),이기근(Kee-Keun Lee),양상식(Sang-Sik Yang) 대한전기학회 2011 전기학회논문지 Vol.60 No.3
A SAW strain sensor based on Shear Horizontal wave with an 92 ㎒ central frequency was developed. It consists of SAW sensor, PCB substrate and bonding material (Loctite 401). External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. The change in the velocity of the SAW result in a frequency shift of the sensor and by measuring a frequency shift, we can extract the strain induced by the external force. The 41° YX LiNbO₃ was used because it has a Leaky shear horizontal(SH) wave propagation mode and a high electromechanical coupling coefficient (K²=17.2%). And to compare with Rayleigh wave mode, 128° YX LiNbO₃ was used. And to make a stable and low insert loss, Split IDT structure was used. The obtained sensitivity and linearity of the SAW strain sensor in the case of Split IDT were measured to be 17.2 ㎑ / % and 0.99, respectively.
진행파의 코리올리효과를 이용한 자가발진형 표면탄성파 초소형 자이로스코프
오해관(Hae-Kwan Oh),최기선(Ki-Sun Choi),이형근(Hyung-Keun Lee),이기근(Kee-Keun Lee),양상식(Sang-Sik Yang) 대한전기학회 2010 전기학회논문지 Vol.59 No.2
An 80㎒ surface acoustic wave (SAW)-based gyroscope utilizing a progressive wave was developed on a piezoelectric substrate. The developed sensor consists of two SAW oscillators in which one is used for sensing element and has metallic dots in the cavity between input and output IDTs. The other is used for a reference element. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, oscillation frequency differences between the two oscillators were observed because of the Coriolis force acting on the metallic dots. Depending on the angular rate, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 ㎐/degㆍs within the angular rate range of 0~1000 deg/s. The performances of devices with three IDT structures for two kinds of piezoelectric substrates were characterized. Good thermal stability was also observed during the evaluation process.
Maskless lithography 응용을 위한 마이크로렌즈 어레이 개발
남민우,오해관,김근영,서현우,위창현,송요탁,양상식,이기근,Nam, Min-Woo,Oh, Hae-Kwan,Kim, Geun-Young,Seo, Hyun-Woo,Wei, Chang-Hyun,Song, Yo-Tak,Yang, Sang-Sik,Lee, Kee-Keun 한국마이크로전자및패키징학회 2009 마이크로전자 및 패키징학회지 Vol.16 No.4
마스크리스 리소그래피(maskless lithography)에 응용하기 위한 마이크로렌즈 어레이(microlens array, MLA)가 석영의 습식 식각과 UV 접착제(UV adhesive)의 코팅을 바탕으로 개발되었다. 제작된 MLA의 초점거리는 ${\sim}45\;{\mu}m$ 정도였으며, 집광되는 광선의 초점은 ${\sim}1\;{\mu}m$로 측정되었다. MLA를 통과하며 초점을 맺은 빔(beam)의 크기 및 세기가 charge coupled device (CCD) 카메라와 빔 프로파일러(beam profiler)를 이용하여 각각 측정되었으며, 일정한 세기의 점들이 초점면에서 고르게 관찰되었다. 초점거리는 코팅된 UV 접착제의 두께에 따라 변화하였으며, UV 접착제의 두께가 두꺼울수록 짧아지는 경향을 보였다. 일반적인 마스크 얼라이너(mask aligner)를 이용한 MLA의 UV 포커싱(UV focusing)이 감광막(photoresist, PR) 상에서 실시되었으며, MLA를 통과한 빛이 감광막 위에 일정하게 집광되었다. 마스크 얼라이너와 MLA 사이의 거리 변화에 따라 감광막에 구현된 패턴 사이즈가 조절 되었다. 고온에서 오랜 시간이 지난 후에도 소자의 특성은 전혀 변함이 없었다. A microlens array (MLA) was developed based on the wet-etched quartz substrate and coating of UV adhesive on the substrate for maskless lithography application. The developed MLA has the focal length of ${\sim}45\;{\mu}m$ and the spot size of ${\sim}1\;{\mu}m$. The spot size of the focused beam passing through the MLA was detected by CCD camera, and its intensity was monitored by beam profiler. Uniform spots with nearly identical intensities were observed on the focal plane when a beam passes through the fabricated MLA. The focal length was varied depending on thickness of the coated UV adhesive. The thicker the thickness of the UV adhesive was, the shorter the focal length of the MLA was. With a general mask aligner, UV beam focusing was tested onto photoresist (PR). The beams were well focused onto PR when UV passes through the MLA. Depending on the variable distances from the MLA, beam sizes onto PR were controlled. Even at high temperature for a long time, the performances of the MLA were not changed.
오세인(Se-in Oh),은경태(Kyoungtae Eun),오해관(Hae-kwan Oh),양상식(Sang-sik Yang),좌성훈(Sung-hoon Choa) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
One of the key technologies of intelligent tire monitering system is measuring the deformation of the tire during driving. Tire deformation of the sensor should be operated at extreme conditions and needs wireless communication capability. In this paper, we investigated the feasibility of MEMS SAW sensor as a tire deformation sensor using 3 point bending machine.