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8세대 LCD 공정 장치인 온조기 Chamber의 Head Unit에 대한 열전달 및 유동해석
조대근(Dae-Geun Cho),염승원(Seung-Won Yeom),김태성(Taesung Kim),이상원(Sang-Won Lee),최재붕(Jae-Boong Choi),정인성(In-Sung Jung) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.10
Before the photoresist exposure with ultraviolet light in a LCD panel manufacturing process, the temperature of LCD glass must remain constant. It the temperature varies, the LCD glass may bent and distort during the exposure process. The heat chamber can control and keep the temperature of the LCD glass with the proper head unit design. This head unit is designed to control air streams on the LCD glass. The control ability of heat chamber is determined by nozzle position, fluid velocity and temperature of head unit. To optimize the head unit design, we performed the heat transfer and fluid dynamic simulations on four different models. Each model has different nozzle positions and velocities. Air temperature supplied in the inlet of head unit is set to e constant. The results showed that the head unit with numerous nozzles could effectively control and constantly keep the temperature of the LCD glass within 5 minutes.