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정전기렌즈에 의한 전계방출 전자빔 방출 특성 해석 및 실험
김충수(Chung-Soo Kim),박만진(Man-Jin Park),양희남(Hee-Nam Yang),장동영(Dong-Young Jang),김동환(Donghwan Kim),한동철(Dong-Chul Han),안성훈(Sung-Hoon Ahn) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
A field emission electron gun including three electrodes which are one cathode and two anodes is very crucial for high resolution electron beam applications. To have functions of controlling the initially-emitted electron beam from cathode, two anodes have to form proper equi-potential lines between two anodes (electrostatic lens) being capable of adjusting the beam intensity. To verify the action of electrostatic lens by changing some parameters such as electrode shape, displacement and applied voltage to the electrodes, the two lenses were design and simulated with OPERA-3D. In addition, electron beam behaviors, angular beam intensity (distribution), in three electrodes were tested.
장동영(Jang Dong-Young),김동환(Kim Dong-Hwan),박만진(Park Man-Jin),양희남(Yang Hee-Nam) 한국생산제조학회 2005 한국공작기계학회 추계학술대회논문집 Vol.2005 No.-
The scanning electron microscope(SEM) is an important research and production tool extensively used in many phases of industry throughout the world. The popularity of the instrument results from the need to inspect and obtain information about samples with ever-decreasing structure. The SEM provides higher resolution analysis and inspection than that afforded by current techniques using the optical microscope. Furthermore, unlike the optical microscope, the SEM offers a wide variety of analytical modes, each contributing unique information regarding the physical, chemical, and electrical properties of a particular specimen, device, or circuit.
김일해,김진현,박만진,김종혁,양희남,장동영 한국공작기계학회 2004 한국생산제조학회지 Vol.13 No.5
Chatter monitoring is also important for realizing an unmanned machining system. While many researches were done on this area, it is still a difficult job to detect very small amplitude amount of chattering. A monitoring system using a capacitive spindle displacement sensor was developed to monitor cutting vibration in turning in this research. The variance of the measured spindle displacement signals using the developed sensor was calculated and utilized to quantify the small vibration in machining. The results were compared with variance obtained using a tool dynamometer. The result showed that the developed system could be utilized in monitoring the subtle changes of cutting vibrations with high sensitivity confidence.