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신진현,고문규,정완섭,윤주영,임종연,강상우,Shin, J.H.,Ko, M.K.,Cheung, W.S.,Yun, J.Y.,Lim, J.Y.,Kang, S.W. 한국진공학회 2009 Applied Science and Convergence Technology Vol.18 No.6
차세대 반도체 및 디스플레이 산업용 드라이펌프의 배기속도를 평가하기 위해 최소부피 22 L 급의 정적형 유량계를 설계/제작 하였다. 정적형 유량계의 기본 평가항목인 base pressure와 leak rate 측정결과 각각 $6{\times}10^{-8}\;mbar$ 와 $1.5{\times}10^{-6}\;mbar-L/s$로 측정되었고 throughput limit의 경우 기존 875 L 급보다 1 order 낮은 $1{\times}10^{-3}\;mbar-L/s$ 영역까지 확대되었음이 확인되었다. 구축된 시스템을 이용해 배기용량이 적은 최신 공정 드라이 펌프까지도 배기속도 값을 정확히 측정할 수 있으며, 구축비용이 높은 정압형 유량계를 어느 정도 대체할 수 있을 것으로 기대하고 있다. The constant volume flow meter system (the chamber volume in the 22 L class) was developed to estimate the pumping speed of the dry pump used for the industry of the next generation semiconductor and display. In order to insure the validity of the system, The base pressure and the leak rate in the enclosed system were checked, which were the $6{\times}10^{-8}\;mbar$ and $1.5{\times}10^{-6}\;mbar-L/s$, respectively. Furthermore, it is also confirmed that the value of throughput limit in this system was as much as 1 order of magnitude lower than that in a previously developed system in the 875 L class. By using this developed system, the pumping speed of the new small dry pump was measured. It is believed that the new developed system can be alternating the expensive constant pressure flow meter system in the range of $1{\times}10^{-2}\;mbar-L/s{\sim}1{\times}10^{-3}\;mbar-L/s$.
정적형 유량계를 이용한 소닉노즐 유출계수 교정 방법에 관한 연구
신진현,강상백,박경암,임종연,정완섭,Shin, J.H.,Kang, S.B.,Park, K.A.,Lim, J.Y.,Cheung, W.S. 한국진공학회 2010 Applied Science and Convergence Technology Vol.19 No.4
진공용 기체 유동측정 표준기로 사용하고자 소닉노즐을 ISO 9300에서 제시한 사양에 맞추어 목직경 0.03 mm와 0.2 mm의 소닉 노즐을 제작하였다. 한국표준과학연구원에서 진공용 유량측정 장치로 개발된 정적형 유량계를 이용하여 제작된 2종의 소닉노즐의 유출계수를 확장불확도 3% 이내로 교정하였다. 교정된 소닉노즐의 유량 측정범위는 약 0.6~1,800 cc/min 범위를 갖는 것으로 나타났으며, 사용유동 조건에 해당되는 레이놀드 수(Reynolds number) 범위는 26~12,100으로 확인되었다. 이러한 결과는 교정된 소닉노즐을 이용하여 진공공정에서 필요한 극 미세 유량의 정밀측정을 가능하게 한 새로운 연구결과로 판단된다. 교정된 소닉노즐을 이용하여 진공펌프의 배기속도 측정결과는 기 구축된 정적법을 이용한 배기속도 측정결과와 1% 이내의 오차범위내로 매우 잘 일치함을 보였다. 교정된 소닉노즐은 향후 반도체 및 디스플레이 공정에 사용되는 다양한 건식 진공펌프들의 배기속도를 현장에서 간단하게 평가할 수 있는 현장 성능평가 장치에 활용할 예정이며, 현재 공정현장에서 배기속도 측정에 널리 사용중인 MFC를 대체할 수 있을 것으로 예상된다. Sonic nozzles have been a standard device for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two sonic nozzles of diameter ${\Phi}$ 0.03 mm and ${\Phi}$ 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter(CVFM), readily set up in the Vacuum center of KRISS. was used to calibrate the discharge coefficients of both nozzles. The calibration results were shown to determine them within the 3% expanded measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process in the ranges of 0.6~1,800 cc/min. Those flow conditions are equivalent to the fine gas flow with Reynolds numbers of 26~12,100. Those encouraging results confirm that calibrated sonic nozzles enable precision measurement of extremely low gas flow encountered very often in th vacuum processes. Both calibrated sonic nozzles are proven to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of vacuum pumps in the semiconductor and flat display processes. Furthermore, they can provide other applications to flow control devices in vacuum, such as MFC, etc.
폴리실리콘 슬러지와 제지애시를 활용한 무시멘트 경화체의 알칼리자극제 종류 및 혼입율에 따른 강도특성
신진현 ( Sin Jin-hyun ),김태현 ( Kim Tae-hyun ),김헌태 ( Kim Heon-tae ),이동훈 ( Lee Dong-hoon ),이상수 ( Lee Sang-soo ) 한국건축시공학회 2017 한국건축시공학회 학술발표대회 논문집 Vol.17 No.1
Recently, many experiments using industrial by-products have been going on in Korea and abroad. Most of the studies on blast furnace slag and fly ash have been conducted, and the blast furnace slag based two and three component experiments have been conducted in many places. Therefore, this study is an additional study of research using polysilicon sludge and paper ash, which is a study using existing industrial by-products based on blast furnace slag, as strength properties of alkali activator according to kind and mixing ratio and to obtain basic data do.
경량복합패널 심재의 버미큘라이트 첨가율에 따른 밀도 및 열전도율 특성
신진현 ( Sin Jin-hyun ),김헌태 ( Kim Heon-tae ),김태현 ( Kim Tae-hyun ),이동훈 ( Lee Dong-hoon ),이상수 ( Lee Sang-soo ) 한국건축시공학회 2016 한국건축시공학회 학술발표대회 논문집 Vol.16 No.2
Lately, In case of domestic fire situation, Suffocation due to inflammables has shown higher than direct disaster of the fire among the statistics of death caused by disaster. According to study, Lightweight Hybrid Panel as using the inner or outer wall is made with Polysilicon of the inorganic material, PA and vermiculite, so we make progress to performance experiment and review the density, thermal conductivity properties.
알칼리자극제 종류 및 혼입율에 따른 무시멘트 경량 경화체의 SEM분석 특성
신진현 ( Shin Jin-hyun ),김태현 ( Kim Tae-hyun ),이동훈 ( Lee Dong-hoon ),이상수 ( Lee Sang-soo ) 한국건축시공학회 2017 한국건축시공학회 학술발표대회 논문집 Vol.17 No.2
As the use of cement increases with the development of modern society along with the increase of buildings, environmental pollution intensifies and researches on industrial byproducts are continuing. Research on blast furnace slag and fly ash as industrial byproducts is increasing, and research on industrial byproducts such as polysilicon sludge and paper ash used in this study is increasing. Blast furnace slag, which is one of the industrial byproducts, has been widely studied as a material used with cement. However, in this study, we fabricated lightweight matrix of polysilicon sludge and paper ash replaced based on blast furnace slag, and performed SEM analysis.
제지애시와 폴리실리콘 슬러지를 활용한 무시멘트 경화체의 펄라이트 첨가율에 따른 단열특성
신진현 ( Shin Jin-hyun ),김대연 ( Kim Dae-yeon ),이동훈 ( Lee Dong-hoon ),이상수 ( Lee Sang-soo ) 한국건축시공학회 2018 한국건축시공학회 학술발표대회 논문집 Vol.18 No.2
Researches for the development of renewable energy as a fuel substitute for global warming and depletion of petroleum resources are actively being carried out. Among them, the annual growth rate of PV generation is 20.73%, which is higher than other renewable energy sources. However, the production of 1 ton of polysilicon, which is known as a raw material for solar power generation panels, generates 2 tons of waste. As the demand for PV panels increases, the problem of the treatment of polysilicon sludge is attracting attention, and studies on the utilization of polysilicon sludge are needed. Therefore, in this study, the applicability of polysilicon sludge treated as industrial waste to the lightweight panel for architectural purposes was examined.