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링형 압전 세라믹의 굴곡 진동을 이용한 초음파 모터의 특성
채홍인,임기조,육형상,정수현,신윤식,이정수 충북대학교 건설기술연구소 1993 建設技術論文集 Vol.12 No.1
Using the flexural progressive vibration mode of a piezoelectric ceramic ring, an ultrasonic rotary motor was made. The piezoelectric ceramic ring acts as a stator of a motor. The traveling wave along the circumference of the ring is obtained by driving two standing waves which are temporally and spatially phase shifted by π/2 from each other. The resonance frequency of the piezoelectric ceramic measured by Impedance Analyzer was about 35.4 [㎑] and the maximum revolution speed near resonance frequency was 400 [rpm]. The maximum torque and maximum efficiency of the motor were 1.8 [kgf·㎝] and 13.6[%], respectively. The ultrasonic motor dealt with herein shows fairly good characteristics as a ring type form.