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시효 처리에 의한 42Sn-58Bi 솔더와 무전해 Ni-P/치환 Au UBM 간의 계면 반응
조문기,이혁모,부성운,김태규,Cho Moon Gi,Lee Hyuck Mo,Booh Seong Woon,Kim Tae-Gyu 한국마이크로전자및패키징학회 2005 마이크로전자 및 패키징학회지 Vol.12 No.2
42Sn-58Bi 솔더(이하 wt.$\%$에 의한 표기)와 무전해 Ni-P/치환 Au under bump metallurgy (UBM) 간의 계면 반응을 intermetallic compound (IMC)의 형성과 성장, UBM의 감소, 그리고 범프 전단강도의 영향 관점에서 시효 처리 전 후에 어떠한 변화가 생기는 지를 알아보고자 하였다. 치환 Au 층을 $5{\mu}m$ 두께의 무전해 Ni-P ($14{\~}15 at.\%$ P)위에 세 가지 각기 다른 두께, 즉 $0{\mu}m$(순수한 무전해 Ni-P UBM), $0.1{\mu}m$, $1{\mu}m$로 도금하였다. 그 후 42Sn-58Bi 솔더 범프를 세 가지 다른 UBM 구조에 스크린프린팅 방식으로 형성하였다. 범프 형성 직후에는 세 가지 다른 UBM구조에서 솔더와 UBM 사이에 공통적으로 $Ni_3Sn_4$ IMC (IMC1) 만이 형성됐다. 하지만, 이를 $125^{\circ}C$에서 시효 처리를 할 경우 특이하게 Au를 함유한 UBM 구조에서는 $Ni_3Sn_4$ 위로 또 다른 4원계 화합물 (IMC2)이 관찰되었다. 원자 비로 $Sn_{77}Ni{15}Bi_6Au_2$인 4원계 화합물로 확인되었다. $Sn_{77}Ni{15}Bi_6Au_2$ 층은 솔더 조인트의 접합성에 매우 치명적인 영향을 미쳤다. 시효 처리를 거친 Au를 함유한 UBM 구조에서 솔더 범프의 전단 강도 값은 시효 처리 전에 비해 $40\%$ 이상의 감소를 보였다. The interfacial reaction between 42Sn-58Bi solder (in wt.$\%$ unless specified otherwise) and electroless Ni-P/immersion Au has been investigated before and after thermal aging, with a focus on formation and growth of an intermetallic compound (IMC) layer, consumption of under bump metallurgy (UBM), and bump shear strength. The immersion Au layer with thicknesses of 0 (bare Ni), 0.1, and $1{\mu}m$ was plated on the $5{\mu}m$ thick electroless Ni-P ($14{\~}15 at.\%$P) layer. Then, the 42Sn-58Bi solder balls were fabricated on three different UBM structures by screen-printing and pre-reflow. The $Ni_3Sn_4$ layer (IMC1) was formed at the joint interface after pre-reflow for all the three UBM structures. On aging at $125^{\circ}C$, a quaternary phase (IMC2) was observed above the $Ni_3Sn_4$ layer in the Au-containing UBM structures, which was identified as $Sn_{77}Ni{15}Bi_6Au_2$ (in at.$\%$). The thick $Sn_{77}Ni{15}Bi_6Au_2$ layer deteriorated the integrity of the solder joint and the shear strength of the solder bump was decreased by about $40\%$ compared with non-aged joints.
와이어 본더용 Horn-Holder Assembly의 접촉 해석
장창수,안근식,김영준,곽동옥,부성운,Jang, Chang-Soo,Ahn, Geun-Sik,Kim, Young-Joon,Kwak, Dong-Ok,Boo, Seong-Woon 대한기계학회 2002 大韓機械學會論文集A Vol.26 No.10
Joint structure of a transducer horn-holder assembly fur a wire bonder was examined through FEM contact analysis. A three dimensional modeling and analysis was carried out to survey the internal physics of this structure and to prove the accuracy of a computation compared to a measurement. After validation, a simple two dimensional model was built fur various parametric study considering the efficiency and speed of the computation. Several factors such as boundary conditions, a modeling boundary, mesh density and so on, were considered to obtain consistency with three dimensional analysis. An arc angle and a position of each holder boss were chosen as design parameters. A design of experiment was applied to find out an optimized design of the holder geometry. As a result, a guideline for holder boss design was suggested and main factors and their influence on stress concentration in the transducer horn were surveyed.