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전신영,김동준,김종엽,권진구,전용민,도계령,이성의,Jeon, Sin Young,Kim, Dong Jun,Kim, Jong Yeop,Gwon, Jin Gu,Jeon, Young Min,Do, Gye Ryung,Lee, Seong Eui 한국전기전자재료학회 2021 전기전자재료학회논문지 Vol.34 No.1
In this study, we created a DBD plasma device and a MnO2 catalyst mesh filter for evaluating ozone reduction of devices via the catalyst method. The DBD plasma device was manufactured by applying Ag paste to soda lime glass via the screen-printing method. The MnO2 catalyst mesh filter was manufactured by mixing MnO2 powder with binder with a 10% difference in concentration from 10% to 50% and then applying it using the dip-coating method. Finally, we sintered a MnO2 catalyst mesh filter in an electric furnace. We evaluated the characteristics of ozone generation according to the Ar gas flow of DBD plasma devices, the opening ratio, and ozone reduction performance of the MnO2 catalyst filters. Ozone reduction performance was approximately 20.4% at MnO2 10 wt%, 37.8% at MnO2 30 wt% and 50% at MnO2 50 wt%.