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전처리공정이알루미늄얌극산화법에의해제조된규칙적인나노급미세기공의형성에미치는영향
이재홍,이병욱,김창교,홍진수,Lee Jae-Hong,Lee Byung-Wook,Kim ChangKyo,Hong Chinsoo 대한전기학회 2005 전기학회논문지C Vol.54 No.6
Nano-sizedporearrayswerepreparedbytheself-organizationprocessesoftheanodicoxidationusingthealuminumplatewith99.999$\%$purity.Sincethealuminumplatehasaroughsurface,thealuminumplateof1mmthicknesswasanodizedafterthepre-treatmentsofpressing,mechanicalpolishing,thermaloxidation,chemicalpolishing,andelectrochemicalpolishing.Thediameterofthenano-sizedporesandthethicknessofbarrierlayercanbecontrolledbyappliedvoltage.Thethicknessofaluminamembranecanalsobecontrolledbytheanodizingcurrent.Thenano-sizedporeswithdiameterof60$\~$120nm,thedistancebetweenthenearestporesof30$\~$60nm,andthethicknessof6$\~$7Wwereobtainedbytheanodicoxidationprocess.Theporewideningprocesswasemployedforobtainingtheone-channelwithflatsurfacebecausetheporesofthealuminamembranepreparedbythefixedvoltagemethodshowsthestructureoftwo-channelwithroughsurface.
임준형(Junhyoung Im),주영철(Youngcheol Joo),이주헌(Joohun Lee),김창교(Changkyo Kim) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
A lever type NO₂ micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro heater was built on the gas sensor. The sensing material laid on the heater and electrodes and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor to a target temperature was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power of micro heater to heat up the sensing material to the target temperature showed a good agreement with the measured data. The design of micro gas sensor could be modified to show more uniform temperature distribution and to consume less electric power by optimizing the layout of micro heater and electrodes.