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Steel 기판에 듀얼 스퍼터를 이용한 Cr과 Al의 증착 및 열처리 효과
김경보(Kyoung-Bo Kim),이종필(Jongpil Lee),김무진(Moojin Kim) 한국조명·전기설비학회 2021 조명·전기설비학회논문지 Vol.35 No.10
In this paper, chromium and aluminum were simultaneously deposited with equipment capable of growing two different metal films for various data related to steel substrates. After that, the surface shape of the coated metal film was changed using a heat treatment equipment. The heat treatment conditions were carried out for about 1200s at each temperature of 150°C, 350°C, and 550°C. In the sample observed with the naked eye, different colors were displayed at 550°C. In order to analyze the cause of this phenomenon, the surface was first observed with an electron microscope, and the morphology was different according to the temperature. In the sample before heat treatment, the roughness value was the largest at 16.9 nm, and showed a tendency to increase with temperature to 8.4 nm at 150°C, 10.2nm at 350°C, and 12nm at 550°C. The sheet resistance decreases from 0.052ohm/sq. to 0.023ohm/sq. as the annealing temperature increases from room temperature to 550°C. The optical reflectance results can be explained by electron microscopy images. For the realization of a flexible system on a steel material, the results of this study will be applied to solar cell devices in the future to evaluate its potential.
광전자 소자 및 이차전지 소재로 페로브스카이트 반도체 막을 적용하기 위하여 질소 상압플라즈마 기술을 적용한 표면 처리 연구
김경보(Kyoung-Bo Kim),이종필(Jongpil Lee),김무진(Moojin Kim) 한국조명·전기설비학회 2021 조명·전기설비학회논문지 Vol.35 No.10
Perovskite materials have recently been intensively studied because of their excellent optical properties. However, when this material is exposed to air, there is a problem in that properties deteriorate. In this paper, we investigated whether such deterioration can be restored to its original characteristics by using nitrogen atmospheric pressure plasma technology. In order to observe the return to the original coated film, the experiment was conducted as follows. After coating the perovskite semiconductor material, when exposed to air for about 6 months, some grains are lifted due to contact with oxygen or water vapor, and holes are also observed. In order to restore these grain changes to the originally formed film, the surface of the semiconductor material was treated from 5 s to 1200 s using nitrogen plasma. The surface-treated samples were observed by SEM, EDS, and AFM analysis techniques. As a result of observing the surface shape using SEM, the flotation or hole disappeared for 5 seconds and 10 seconds, and the same surface shape as the deposited film was shown. However, in the film treated for 30 to 60 seconds, the thin film is gradually removed by nitrogen plasma. Under the condition of 180 seconds or more, a number of islands are very densely distributed rather than the form of a film. According to the AFM analysis, the surface roughness of the sample exposed to air for 180 days was about 14.724nm, but it can be seen that the roughness value was significantly reduced to 1.6338nm for the film that was processed for 5 seconds. A solar cell device was fabricated using the film exposed to air for 6 months and the surface-treated film. Nitrogen plasma treatment confirmed the improvement of degraded thin film properties. These results suggest the possibility of restoration even if the perovskite thin film degrades due to exposure to the air in the future.