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γ-FIB 시스템을 이용한 산소 유량 변화에 따른 산화인듐주석 박막의 특성 연구
김동해,손찬희,윤명수,이경애,조태훈,서일원,엄환섭,김인태,최은하,조광섭,권기청,Kim, D.H.,Son, C.H.,Yun, M.S.,Lee, K.A.,Jo, T.H.,Seo, I.W.,Uhm, H.S.,Kim, I.T.,Choi, E.H.,Cho, G.S.,Kwon, G.C. 한국진공학회 2012 Applied Science and Convergence Technology Vol.21 No.6
본 연구는 RF 마그네트론 스퍼터링법을 이용하여 산소유량 변화에 따라 증착된 ITO 박막 구조적, 전기적, 광학적 특성을 분석하였다. ITO (Indium Tin Oxide) 박막은 $1.0{\times}10^{-3}$ Torr의 공정 압력과 2 kW 및 13.56 MHz의 RF 전력, 1,000 sccm의 Ar 가스 조건하에 0~12 sccm의 $O_2$ 가스 유량을 변경하면서 증착하였다. 광투과율 측정은 적분구를 이용하였으며, 측정 파장 범위는 300~1,100 nm이다. 4-point probe를 이용하여 면저항을 측정하였으며, Hall Measurement System을 이용하여 비저항, 캐리어 농도 및 전자이동도를 측정하였다. Scanning electron microscope 장비를 이용하여 ITO 박막 표면을 분석하였고, 박막의 거칠기는 Atomic force microscope을 이용하여 측정하였다. ${\gamma}$-Focused ion beam system을 이용하여 ITO 박막의 이차전자방출계수를 측정하였으며, 이차전자방출계수 값으로 Auger neutralization mechanism 분석법을 이용해 ITO 박막의 일함수를 결정하였다. 3 sccm의 산소 유량에서 증착된 ITO 박막의 비저항은 약 $2.4{\times}10^{-4}{\Omega}{\cdot}cm$로 가장 좋았으며, 광학적 특성 또한 84.93% (Weighted average)로 가장 좋은 것을 확인할 수 있었다. 이 조건에서 이차전자방출 계수가 가장 높았고 일함수는 가장 낮은 경향의 일치함을 확인하였다. Indium Tin Oxide (ITO) thin films were prepared by RF magnetron sputtering with different flow rates of $O_2$ gas from 0 to 12 sccm. Electrical and optical properties of these films were characterized and analyzed. ITO deposited on soda lime glass and RF power was 2 kW, frequency was 13.56 MHz, and working pressure was $1.0{\times}10^{-3}$ Torr, Ar gas was fixed at 1,000 sccm. The transmittance was measured at 300~1,100 nm ranges by using Photovoltaic analysis system. Electrical properties were measured by Hall measurement system. ITO thin films surface were measured by Scanning electron microscope. Atomic force microscope surface roughness scan for ITO thin films. ITO thin films secondary electron emission coefficient(${\gamma}$) was measured by ${\gamma}$-Focused ion beam. The resistivity is about $2.4{\times}10^{-4}{\Omega}{\cdot}cm$ and the weighted average transmittance is about 84.93% at 3 sccm oxygen flow rate. Also, we investigated Work-function of ITO thin films by using Auger neutralization mechanism according to secondary electron emission coefficient(${\gamma}$) values. We confirmed secondary electron emission peak at 3 sccm oxygen flow rate.
김동해 ( Dong Hae Kim ),안상돈 ( Sang Don Ahn ),강병규 ( Byung Kyu Kang ) 한국협동조합학회 2011 韓國協同組合硏究 Vol.29 No.3
The purpose of this paper is to improve the merging of the regional agricultural cooperatives through empirical analysis. This paper ① limited the scope of the study to regional agricultural cooperatives, ② narrowed the subjects to 17 regional agricultural cooperatives which were merged in 2006 and 111 non-merged regional agricultural cooperatives among the 129 regional agricultural cooperatives in Jeon-Nam and ③ set the analysis period to four (4) years, from 2006 to 2009. After applying the Data Envelopment Analysis (DEA) model, the management efficiency of both merged and non-merged regional agricultural cooperatives in Jeon-Nam was measured by type of location (agricultural, semi-agricultural), number of member farmers and size of equity. According to the Mann-Whitney U-test on difference in efficiency, no difference was observed in overall efficiency (CCR) and technical efficiency (BCC) between merged and non-merged regional agricultural cooperatives. The difference in productivity change trends between merged and non-merged regional agricultural cooperatives has been analyzed in regional agricultural cooperatives in Jeon- Nam using MPI. According to the analysis, merged cooperatives were 0.899 while non-merged cooperatives were 1.513 in terms of annual mean productivity changes. Therefore, it appears that non-merged regional agricultural cooperatives are greater than merged regional agricultural cooperatives. In order to create synergy after merger, in addition, it is necessary to develop and launch a merging program focusing on the Post Merger Integration (PMI) system. There has been no synergy after merger because two or three poor or ailing cooperatives have been included in the merger. Therefore, the synergy is very limited even though relatively sound cooperatives have been merged.