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김동립(Donglip Kim),김경태(Kyeongtae Kim),권오명(Ohmyoung Kwon),박승호(Seungho Park),최영기(Young Ki Choi),이준식(Joon Sik Lee) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
Scanning Thermal Microscope (SThM) has been known for its superior resolution for local temperature and thermal property measurement. However, commercially available SThM probe which is the key component of SThM does not provide resolution enough to explore nanoscale thermal phenomena. Here, we developed a SThM probe fabrication process that can achieve spatial resolution around 50 ㎚. The batch-fabricated probe has a thermocouple junction located at the end of the tip. The size of the thermocouple junction is around 200 ㎚ and the distance of the junction from the very end of the tip is 150 ㎚. The probe is currently being used for nanoscale thermal probing of nano-material and nano device.
노희환(Hee Hwan Roh),김동립(Donglip Kim),박지상(Ji Sang Park),김경태(Kyeongtae Kim),권오명(Ohmyoung Kwon),이준식(Joon Sik Lee) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
In this study we propose a nanoscale thermal property measurement technique utilizing thermocouple scanning thermal microscope (SThM) probe we just nanofabricated. In order to use thermocouple SThM probe for local thermal property measurement, we developed and demonstrated a new signal measurement technique that can electrically heat the thermocouple junction and extract thermoelectric signal from it simultaneously. We are now carrying out thermal property measurement of nanoscale sample such as CNT with the newly developed technique and probe.