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PET 기판 위에 스퍼터 압력 변화에 따라 제조된 ITO 박막의 특성에 관한 연구
장동수(Dong-Su Jang),권명현(Myeong-Hyun Kwon) 산업기술교육훈련학회 2012 산업기술연구논문지 (JITR) Vol.17 No.2
We prepared ITO films on PET substrate by DC magnetron sputtering method using powdery target with different sputter pressure. The deposited rate, XRD(x-ray diffraction), resistivity, transmittance and reflectance were investigated. As the sputtering pressure was higher, the resistivity of ITO films increased. As the working pressure increased, the optical transmittance improved at visible region of light.