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논문 : GaN계 수직형 발광 다이오드를 위한 N-face n-GaN의 인듐계 저저항 오믹접촉 연구
강기만 ( Ki Man Kang ),박민주 ( Min Joo Park ),곽준섭 ( Joon Seop Kwak ),김현수 ( Hyun Soo Kim ),권광우 ( Kwang Woo Kwon ),김영호 ( Young Ho Kim ) 대한금속재료학회 ( 구 대한금속학회 ) 2010 대한금속·재료학회지 Vol.48 No.5
We investigated the In-based ohmic contacts on Nitrogen-face (N-face) n-type GaN, as well as Gaface n-type GaN, for InGaN-based vertical Light Emitting Diodes (LEDs). For this purpose, we fabricated Circular Transfer Length Method (CTLM) patterns on the N-face n-GaN that were prepared by using a laserlift off method, as well as on the Ga-face n-GaN that were prepared by using a dry etching method. Then, In/transparent conducting oxide (TCO) and In/TiW schemes were deposited on the CTLM in order for low resistance ohmic contacts to form. The In/TCO scheme on the Ga-face n-GaN showed high specific contact resistance, while the minimum specific contact resistance was only 3×10(-2) Ω-cm2 after annealing at 300℃, which can be attributed to the high sheet resistance of the TCO layer. In contrast, the In/TiW scheme on the Ga-face n-GaN produced low specific contact resistance of 2.1×10(5) Ω-cm2 after annealing at 500℃ for 1 min. In addition, the In/TiW scheme on the N-face n-GaN also resulted in a low specific contact resistance of 2.2×10(-4) Ω-cm2 after annealing at 300℃. These results suggest that both the Ga-face n-GaN and N-face n-GaN.
알루미나이드-이트륨 복합코팅층의 고온부식에 미치는 이트륨 영향
김선효,이창희,권광우,김규영 대한금속재료학회(대한금속학회) 1993 대한금속·재료학회지 Vol.31 No.9
The composite coating of aluminide-yttrium has shown excellent corrosion resistance under cyclic high temperature hot corrosion environment. To understand the effect of the yttrium on the stability of the composite coating, the specimens were prepared with various coating parameters such as thickness of Y layer, sequence of post heat treatment, and surface condition before Y ion plating. Performance of the composite coating was evaluted by the isothermal oxidation and cyclic high temperature hot corrosion. Test results of isothermal oxidation show that the Y in the composite coating helps to form a thick and dense Al₂O₃ scale which is ductile and resistant to thermal stress. The Y in Al₂O₃ may act as a donor which leads to increase in the concentration of interstitial oxygen and thus increase in oxidation rate. The presence of Y₂O₃ and (Y, Al)O type compounds in the grain boundaries of Al₂O₃ itself and the boundaries between the Al₂O₃ and NiAl effectively prohibits the fast diffusion of oxidants, and Al along the grain boundaries. Consequently, it may induce slow diffusion through the matrix, and thus the corrosion resistance of the conposite coating under cyclic hot corrosion increases substantially.