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현미경 탑재식 초정밀 위치제어 스테이지 개발에 대한 연구
이경수(Lee Kyeong Soo),안정호(Ahn Jeongho),권순근(Kwon Soon Geun),박효준(Park Hyojun),곽윤근(Kwak Yoon Guen),김수현(Kim Soo-Hyun) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
In order to measure the mechanical-property of bio-molecules, we use a center-hollow type ultra-fine positioning stage, which is designed for an inverted microscope. Because the experiment takes several minutes, the stage should not have drift for several minutes. Nevertheless, the ultra-fine positioning stage has a lot of thermal drift. Especially, the thermal error in position sensing system makes significant drift. Therefore, to control the thermal drift, I suggest a compensation design in sensing system. It will reduce the thermal drift in system by 10~30 times.