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고명준(Myung-Jun Ko),V. Patrangenaru(Vlad Patrangenaru),홍성욱(Seong-Wook Hong),이득우(Deug-Woo Lee) 한국생산제조학회 2005 한국공작기계학회 추계학술대회논문집 Vol.2005 No.-
This paper introduces a couple of surface matching algorithms that can be used to reconstruct the surface topography of an object scanned of by an AFM. These image matching techniques are applied to two neighboring images intentionally overlapped with each other. To enhance the performance, this paper compare two algorithms using the correlation coefficient and the sum of the squared differences. To compensate for the inaccuracy of the coarse stage implemented to AFM, all the six axes including the rotational degrees of freedom are successively matched to maximize the coefficient defined. The results show that the proposed algorithms are useful for measurement range extension of AFM. The results also show that a combined use of the two indices is beneficial for practical cases.
홍성욱,고명준,신영현,이득우 한국공작기계학회 2005 한국공작기계학회 춘계학술대회논문집 Vol.2005 No.-
This paper proposes a measurement method for the surface of micro-parts by using AFM(Atomic Force Microscope). To this end, two techniques are presented to extend the capacity of AFM. First, the measurement range is extended by using an image matching method based on correlation coefficients. To account for the inaccuracy of the coarse stage implemented in AFM's, the image matching technique is applied to two neighboring images intentionally overlapped with each other. Second, a method to measure the shape of relatively large specimen is presented by using the inherent trigger mechanism due to the atomic force. The proposed method is proved effective through a series of experiments.