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반도체 구리 배선공정에서 표면 전처리가 이후 구리 전해/무전해 전착 박막에 미치는 영향
임태호,김재정,Lim, Taeho,Kim, Jae Jeong 한국전기화학회 2017 한국전기화학회지 Vol.20 No.1
This study investigated the effect of surface pretreatment, which removes native Cu oxides on Cu seed layer, on subsequent Cu electro-/electroless deposition in Cu interconnection. The native Cu oxides were removed by using citric acid-based solution frequently used in Cu chemical mechanical polishing process and the selective Cu oxide removal was successfully achieved by controlling the solution composition. The characterization of electro-/electrolessly deposited Cu films after the oxide removal was then performed in terms of film resistivity, surface roughness, etc. It was observed that the lowest film resistivity and surface roughness were obtained from the substrate whose native Cu oxides were selectively removed. 본 연구에서는 구리 배선 공정에서 구리 씨앗층 표면에 형성되는 구리 자연산화물을 제거하는 표면 전처리가 후속 구리 전착에 미치는 영향을 살펴보았다. 구리 배선 공정의 화학적 기계적 연마 공정에서 사용하는 citric acid 기반의 용액을 구리 표면 전처리 과정에 적용하여 표면에 존재하는 구리 자연 산화물을 제거하였고, 용액 조성 변화를 통해 산화물 제거의 선택성을 높여 구리 씨앗층의 손실을 최소화하였다. 또한 표면 전처리 후 구리 전해 전착과 무전해 전착을 시도하여 전착한 박막의 비저항, 표면 거칠기 등의 성질을 비교하고, 이를 통해 선택적으로 구리 산화물을 제거한 이후에 전착된 박막의 비저항과 표면 거칠기가 가장 낮게 나타남을 확인하였다.
임태호,오재훈,조영석,강형구,김원희,지영준,송영탁,김인영,이준철 연세대학교의과대학 2016 Yonsei medical journal Vol.57 No.2
Purpose: During cardiopulmonary resuscitation (CPR), chest compression (CC) depth is influenced by the surface on which the patient is placed. We hypothesized that training healthcare providers to perform a CC depth of 6–7 cm (instead of 5–6 cm) on a manikinplaced on a mattress during CPR in the hospital might improve their proper CC depth. Materials and Methods: This prospective randomised controlled study involved 66 premedical students without CPR training. The control group was trained to use a CC depth of 5–6 cm (G 5–6), while the experimental group was taught to use a CC depth of 6–7 cm (G 6–7) with a manikin on the floor. All participants performed CCs for 2 min on a manikin that was placed on a bed 1 hour and then again 4 weeks after the training without a feedback. The parameters of CC quality (depth, rate, % of accurate depth) were assessed and compared between the 2 groups. Results: Four students were excluded due to loss to follow-up and recording errors, and data of 62 were analysed. CC depth and % of accurate depth were significantly higher among students in the G 6–7 than G 5–6 both 1 hour and 4 weeks after the training (p<0.001), whereas CC rate was not different between two groups (p>0.05). Conclusion: Training healthcare providers to perform a CC depth of 6–7 cm could improve quality CC depth when performing CCs on patients who are placed on a mattress during CPR in a hospital setting.
제주도 개량초지에 있어서 띠, 잔디에 의한 피해도 조사연구
조남기,임태호 제주대학교 1973 논문집 Vol.5 No.-
This study was made to survey intruding of Imperata cylindrica and Zoysia japonica into improved pastures in Cheju-do. The results were summarized as follow: 40 species of weeds were found on improved pastures in Cheju-do. Imperata cylindrica and Zoysia japonica were dominant. I. Cylindrica was 31.53% in cover degree and 39.32% in density. and Z. japonica 11.42% in cover degree and 22.64% in density in all pastures improved after 1966. In course of years I. cylindrica and Z. japonica were increased but improved grasses were decreased incoverage and density. Improved grasses were scarcely found on the pastures improved before 1968.