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솔-젤법에 의한 Al-doped ZnO 투명전도막의 제조 및 특성
현승민,홍권,김병호,Hyun, Seung-Min,Hong, Kwon,Kim, Byong-Ho 한국세라믹학회 1996 한국세라믹학회지 Vol.33 No.2
ZnO and Al-doped ZnO thin films were prepared by sol-gel dip-coating method and electrical and optical properties of films were investigated. Using the zinc acetate dihydrate and acetylaceton(AcAc) as a chelating agent stable ZnO sol was synthesized with HCl catalyst. Adding aluminium chloride to the ZnO sol Al-doped ZnO sol could be also synthesized. As Al contents increase the crystallinity of ZnO thin film was retarded by increased compressive stress in the film resulted from the difference of ionic radius between Zn2+ and Al3+ The thickness of ZnO and Al-doped ZnO thin film was in the range of 2100~2350$\AA$. The resistivity of ZnO thin films was measured by Van der Pauw method. ZnO and Al-doped ZnO thin films with annealing temperature and Al content had the resistivity of 0.78~1.65$\Omega$cm and ZnO and Al-doped ZnO thin film post-annealed at 40$0^{\circ}C$ in vacuum(5$\times$10-5 torr) showed the resistivity of 2.28$\times$10-2$\Omega$cm. And the trans-mittance of ZnO and Al-doped ZnO thin film is in the range of 91-97% in visible range.
공명법을 사용한 나노 스케일 Al 박막의 열-기계적 거동 측정
현승민(Seungmin Hyun),박정민(Jungmin Park),이학주(Hak-Joo Lee),Walter Brown 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
Thin films in the sub micrometer thickness range have been studied due to their importance in applications such as semiconductor devices, storage media and micromechanical systems. There has been enormous progress in micromechanical system design and fabrication to take advantage of structures with small dimensions. For micromechanical systems such as micromirrors, the long-term stress stability of the thin metal films is a major concern because residual stresses present in metal layers and changes in those stresses with time cause undesired curvature and curvature changes in films on substrates. Among several metal films that serve as structural elements or reflective surfaces in this type of application, Al is attractive because it is light and provides good reflectivity at low cost compared to more noble metals. In order to gain a better understanding of mechanical behavior in very thin films we have studied the stress changes of nanoscale Al thin films using a unique resonance system