나노 프로브의 설계 및 제조 공정

박영근(Young Geun Park),황규호(Kyu Ho Hwang),성우경(Woo Kyung Sung) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.11

Nano probe with Si tip, PR sensor for displacement sensing which is actuated by piezoelectric mateteial(PZT) was designed. Unit process for fabricating the nano probe were developed. By integrating unit process, the nano probe was fabricated. The displacement of nano probe with applied voltage was measured. And array nano probe was fabricated by expanding unit nano probe.

Nickel Nano-Probe Shape Control Using a Ring Cathode

Ki-Bum Kim,Jaewu Choi 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.55 No.6

The control of nickel nano-probe shapes is studied using a ring cathode. The shape of the nickel nano-probe depends on the diameter of the ring cathode and the applied bias voltage. As the applied voltage increases, the byproduct changes from green nickel chloride to dark black nickel oxide, and the evolution gas switches from chlorine to oxygen. This influences the distribution and the diffusion of electrolytes, as well as the shape of the nickel nano-probe. Additionally, a larger ring diameter helps to form thin flat membranes and influences the shape of the nickel nano-probe. The control of nickel nano-probe shapes is studied using a ring cathode. The shape of the nickel nano-probe depends on the diameter of the ring cathode and the applied bias voltage. As the applied voltage increases, the byproduct changes from green nickel chloride to dark black nickel oxide, and the evolution gas switches from chlorine to oxygen. This influences the distribution and the diffusion of electrolytes, as well as the shape of the nickel nano-probe. Additionally, a larger ring diameter helps to form thin flat membranes and influences the shape of the nickel nano-probe.

High Precision and Low Force Resonant Probe Based on Quartz Tuning Fork

Qiangxian Huang,Wenqian Wang,Guangpu Wang,Rongjun Cheng,Liansheng Zhang,Hongli Li,Ruijun Li 한국정밀공학회 2023 International Journal of Precision Engineering and Vol.24 No.11

To realize the high-precision three-dimensional (3D) measurement of micro-precision devices, a 3D resonant trigger probe based on quartz tuning fork for micro/nano coordinate measuring machine (CMM) is proposed. The probe is composed of a quartz tuning fork, a tapered optical fiber stylus and a microsphere. It vibrates in resonance state and makes contact with the measured surface in the Z direction in tapping mode, while in the X and Y directions, it operates in friction mode. The 3D nano-positioning of the probe is achieved by the changes in resonance parameter caused by the interatomic force between the microsphere and the surface of the measured sample. In this study, the diameter of the probe microsphere can be as low as 80 μm, and the length of the probe stylus is approximately 5 mm. The trigger resolution of the probe in the X, Y and Z directions are 0.44, 0.41 and 0.34 nm, respectively. The probing forces in the X, Y and Z directions are 2.25, 1.81 and 4.24 μN, respectively. Experimental results verify that the proposed probe has the advantages of small size, sub-nano resolution and very low probing force. This probe can be used as the trigger probe of micro/nano CMM, which can be triggered by interatomic force.

탐침형 정보저장 기술을 위한 실리콘 탐침의 나노 마멸 특성에 관한 연구

이용하(Y. H. Lee),정구현(K. H. Chung),김대은(D. E. Kim),유진규(J. G. Yoo),홍승범(S. B. Hong) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월

The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20㎛/s respectively. The damage of the probe tip was quantitatively as well as qualitatively characterized by Field Emission Scanning Probe Microscope (FESEM) analysis and calculated based on Archard’s wear equation. It was shown that the wear coefficient of the probe tip was in the order of 10?⁴ ~10?³, and significant contamination at the end of the probe tip was observed. Thus in order to implement the AFM-based recording technology, tribological optimization of the probe/media interface must be achieved.

Analysis of the light transmission through nano-apertures on plateau pyramid

S.S. Choi,O.K. Suwal,V.K. Jha,김대욱,M.J. Park 한국물리학회 2009 Current Applied Physics Vol.9 No.11

The nano-size metallic aperture array has been fabricated using conventional semiconductor fabrication techniques and focused ion beam. The micron size patterns were transferred on SOI wafer using photographic patterning process, and the plateau pyramidal structures were fabricated using wet Si etching with alkaline solution followed by thermal oxidation. In order to reveal the plateau type pyramid, the backside Si bulk etching was performed. The metallic Al thin film was deposited and the nano-apertures with the diameters ranging from 190 nm to 380 nm were fabricated using focused ion beam milling method. The skin-depth of the Al thin film at 532 nm wavelength is known to be ~10 nm. The deposited Al thin film is thick enough to become opaque. Circular types of periodic grooves were fabricated around the sub-wavelength size nano-aperture in order to examine the transmittance of the light coupled to circular periodic grooves. The far-field measurements for the optical transmittance through a sub-wavelength size nano-probe have been investigated and found to be up to 103 fold increase, compared to the output intensity of aperture without groove patterns.

Nano-scanner for Scanning Probe Microscopes

박재홍,이동연 한국물리학회 2012 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.61 No.9

A two-axes nano-scanner for the scanning probe microscope (SPMs) was developed. The flexure guided nano-scanner can move SPM samples or the probe itself along the <I>x</I> and <I>y</I> axes. The theoretical stiffness and resonant frequency of the flexure guide are obtained by the Castigliano’s theorem. The optimal nano-scanner that maximizes the scanning speed under appropriate constraints was designed. The optimal results were compared with the finite element analysis results. The scanner performance was evaluated by various experiments and compared with the optimal design results. Finally, the atomic force microscope images obtained by using the proposed nano-scanner were presented.

The principles and applications of nano-diagnosis system for a nano-biosensor

김종민,Karube Isao,장상목,Hiroshi Muramatsu 한국화학공학회 2011 Korean Journal of Chemical Engineering Vol.28 No.4

In this review, the basic principles and research trends of biosensors are briefly described and a nano-sensing system applying QCM (quartz crystal micro-balance), nano-diagnosis methods by AFM (atomic force microscopy)and SNOAM (scanning near-field/atomic force microscopy) is discussed intensively. The principle, construction, and applications of piezoelectric crystal sensors as a universal sensor are reviewed. This review is focused mainly on liquid phase applications, such as immune-sensors, gelation detecting sensors, and cultured cell monitoring sensors. The principle of nano-diagnosis based on the AFM or SNOAM techniques is described in detail. Finally, the binding affinity of peptide probes to proteins using AFM and the visualizing of a hybridized PNA probe on a DNA molecule using SNOAM are evaluated and discussed.

Analysis of the light transmission through nano-apertures on plateau pyramid

Choi, S.S.,Suwal, O.K.,Jha, V.K.,Kim, D.W.,Park, M.J. Elsevier 2009 Current Applied Physics Vol.9 No.1

The nano-size metallic aperture array has been fabricated using conventional semiconductor fabrication techniques and focused ion beam. The micron size patterns were transferred on SOI wafer using photographic patterning process, and the plateau pyramidal structures were fabricated using wet Si etching with alkaline solution followed by thermal oxidation. In order to reveal the plateau type pyramid, the backside Si bulk etching was performed. The metallic Al thin film was deposited and the nano-apertures with the diameters ranging from 190nm to 380nm were fabricated using focused ion beam milling method. The skin-depth of the Al thin film at 532nm wavelength is known to be ∼10nm. The deposited Al thin film is thick enough to become opaque. Circular types of periodic grooves were fabricated around the sub-wavelength size nano-aperture in order to examine the transmittance of the light coupled to circular periodic grooves. The far-field measurements for the optical transmittance through a sub-wavelength size nano-probe have been investigated and found to be up to 10<SUP>3</SUP> fold increase, compared to the output intensity of aperture without groove patterns.

탄소 나노튜브 프로브 조립을 위한 탄소 나노튜브의 전기적 조작 방법

권순근(Soon-Geun Kwon),임동현(Dong-Hyun Lim),곽윤근(Yoon Keun Kwak),김수현(Soo-Hyun Kim) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11

During the past several years, carbon nanotube probes(CNT probes) have been used for various applications such as scanning microscope probe, electron emitting device and sensor for chemical and biological applications. Even though their versatile applications, there is an limitation especially on the reproducible fabrication of CNT probes. In this paper, Dielectrophoresis, one of the electrical manipulations, is used to manipulate CNT and make an assembly of CNT between the electrodes. We used the technique of the simultaneous conductance measurement while using the dielectrophoresis to trap the CNTs between the electrodes. A CNT probe fabrication is performed through the mechanical breakdown of the CNT-electrodes assembly with a high yield rate. This fabrication method is quite simple and eligible for the highly reproducible CNT probe fabrication.

생물학적 초미세력 검출을 위한 탄소나노튜브 프로브의 제작 및 기계적 특성 검출

권순근(Soongeun Kwon),박효준(Hyojun Park),이형우(Hyung Woo Lee),곽윤근(Yoonkeun Kwak),김수현(Soohyun Kim) Korean Society for Precision Engineering 2008 한국정밀공학회지 Vol.25 No.5

In this study, a carbon nanotube probe (CNT probe) is proposed as a mechanical force transducer for the measurement of pico-Newton (pN) order force in biological applications. In order to measure nantube's displacement in the air or liquid environment ,the fabrication of a CNT probe with tip-specific loading of fluorescent dyes is performed using tip-specific functionalization of the nanotube and chemical bonding between dyes and nanotube. Also, we experimentally investigated the mechanical properties of the CNT probe using electrostatic actuation and fluorescence microscope measurement. Using fluorescence measurement of the tip deflection according to the applied voltage, we optimized the bending stiffness of the CNT probe, therefore determined the spring constant of the CNT probe. The results show that the spring constant of CNT probes is as small as 1 pN/㎚ and CNT probes can be used to measure pN order force.