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Development of Low Power SRAM with Spacer-On Stopper Structure using Co Salicide
Joo Young Kim,Hyeongtag Jeon,Chongmu Lee,Ju Youn Kim,Nam-Chul Kim,Sung Jin Kim,Yangdo Kim 한국물리학회 2003 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.43 No.51
We investigated an advanced disposable spacer for the Co salicide (C-ADS) structure to reduce eectively the short channel eects and to provide reliable device operating characteristics. The C-ADS structure with a modied gate sidewall was made to allow a relatively small enough cell contact open area to decrease the junction leakage current even with a very tight design rule. The C-ADS structure had excellent Co salicide uniformity due to the relatively large area provided for Co formation. Co salicide required a junction depth above 40 keV. The N+ and the P+ active sheet resistances were about 6 /sq, and the contact resistance values measured both at the N+ and the P+ node were less than several /sq for CoSix. The surface channel p-channel metal-oxide semiconductors (PMOS) showed a very low threshold voltage of about 0.65V compared to that of the buried-channel PMOS. The C-ADS structure eectively reduced the short-channel eects and provided reliable device operating characteristics.t.
Formation Characteristics of Precipitated Calcium Carbonate by Carbonation Process
Chiho Kim,Mingwang Seok,Yangdo Kim 한국재료학회 2021 한국재료학회지 Vol.31 No.1
The characteristics and morphology of precipitated calcium carbonate (PCC) particles produced by carbonation process with various experimental conditions are investigated in this study. The crystal structures of PCC formed by carbonation process are calcite and aragonite. The crystal structure of PCC particles synthesized without adipic acid additive is calcite only, regardless of the reaction temperature. Needle-like shape aragonite phase started to form at reactor temperature of 80°C with the adipic acid additive. Particle size of the single phase calcite PCC synthesized without adipic acid additive is about 1 ~ 3 μm, with homogenous distribution. The aragonite PCC also shows uniform size distribution. The reaction temperature and concentration of adipic acid additive do not show any significant effects on the particle size distribution. Aragonite phase grown to a large aspect ratio of needle-like shape showed relatively improved whiteness. The measured whiteness value of single calcite phase is about 95.95, while that of the mixture of calcite and aragonite is about 99.11.
Ju Youn Kim,Hyeongtag Jeon,Keun Woo Lee,Yangdo Kim,Young Do Kim,Hee Ok Park 한국물리학회 2004 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.45 No.1
Remote plasma-enhanced atomic-layer deposition with tertbutyllimidotris(diethylamido)tantalum as the Ta precursor and NH3 gas or NH3 plasma as the reactant was used to deposit TaN lms, the TaN lms deposited at 250 C showed a lower carbon impurity contents when NH3 plasma was used as the reactant. The resistivities of the TaN lms processed with NH3 gas and NH3 plasma were approximately 3,000 and 1,000 cm, respectively. The growth rates of the TaN lm processed with NH3 gas and NH3 plasma were about 1.3 and 1.4 per cycle, respectively. The TaN lms showed a relatively smooth interface and amorphous characteristics exhibited excellent step coverage on 0.25-m-wide by 2.5-m-deep contact hole structure. The barrier characteristics of Cu/TaN/Si samples were observed after annealing at various temperatures, and the TaN lms failed after annealing at 700 ℃.
김지혜(Ji-Hye Kim),이창래(Chang Rae Lee),정용수(Youngsoo Jeong),김양도(Yangdo Kim),김인배(In-Bae Kim) 한국표면공학회 2008 한국표면공학회지 Vol.41 No.3
The pyrolysized carbon xerogel and aerogels were prepared from the sol-gel polymerization of resorcinolformaldehyde(RF) followed by the dry process under ambient pressure and supercritical carbon dioxide condition respectively. The thermal behaviour of RF polymer xerogel was investigated with TGA analyzer to correspond with the pyrolysis process. The surface properties such as particle size, morphology and the point of zero charge of the pyrolysized porous carbon aerogels were studied for the precious metal catalyst supported media. It was found that the volume of the polymer aerogel decreased because of the significant linear shrinkage and weight loss of polymer gel during the carbonization. The point of zero charge of the carbon aerogel pyrolysized at 1050℃ under inert gas flow was about 10.
Moonhee Choi,Jihun Yu,Donghwan Kim,Inbae Kim,Yangdo Kim 한국자기학회 2011 Journal of Magnetics Vol.16 No.4
Nd2Fe14B permanent magnetic powders (iHc = 9.2 kOe, Br = 12.2 kG) were produced by HDDR process. Their coercivity was enhanced to 12.6 kOe through the grain boundary diffusion process with dysprosium hydride (DyHX). DyHX diffusion process was optimized through rotating diffusion process, resulting in distinct phases rich in Nd and Dy observable by field emission scanning microscopy and transmission electron microscopy. The mechanism of coercivity enhancement that resulted in restrain the coupling effect between Nd2Fe14B grains is also discussed.
Effect of Nonionic Surfactants on F-Gases (HFC-134a and SF<sub>6</sub>) Hydrate Formation
Lee, Hyunju,Lee, Ju Dong,Kim, Yangdo American Chemical Society 2018 INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH - Vol.57 No.39
<P>Fluorinated gases (F-gases), such as 1,1,1,2-tetrafluoroethane (HFC-134a) and sulfur hexafluoride (SF<SUB>6</SUB>), are used widely in a variety of industrial processes but they are some of the most potent greenhouse gases. A clean process using the principle of gas hydrate formation can be a new alternative to the separation and recovery of these greenhouse gases. In this study, alcohol ethoxylate (AE), vegetable oil ethoxylate (VOE), and alkyl polymer (AP), which are known to be nonionic, less toxic, and readily biodegradable surfactants, were used as additives to improve the hydrate kinetics. All surfactants increased the kinetics of HFC-134a and SF<SUB>6</SUB> hydrate formation. In particular, the rates of HFC-134a and SF<SUB>6</SUB> hydrate formation was fastest when AP was added. In the case of AP addition, the inflection point at which the formation rates of SF<SUB>6</SUB> hydrate increased significantly was also found. The addition of AP not only improved the rates of HFC-134a and SF<SUB>6</SUB> hydrate formation but also reduced the hydrate nucleation time.</P> [FIG OMISSION]</BR>