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RISS 인기검색어
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- 저자 : Baojun Chen (검색결과 3 건)
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An investigation on dicing 28-nm node Cu/low-k wafer with a Picosecond Pulse Laser
Hsu, Hsiang-Chen,Chu, Li-Ming,Liu, Baojun,Fu, Chih-Chiang The Korean Microelectronics and Packaging Society 2014 마이크로전자 및 패키징학회지 Vol.21 No.4
For a nanoscale Cu/low-k wafer, inter-layer dielectric (ILD) and metal layers peelings, cracks, chipping, and delamination are the most common dicing defects by traditional diamond blade saw process. Sidewall void in sawing street is one of the key factors to bring about cracks and chipping. The aim of this research is to evaluate laser grooving & mechanical sawing parameters to eliminate sidewall void and avoid top-side chipping as well as peeling. An ultra-fast pico-second (ps) laser is applied to groove/singulate the 28-nanometer node wafer with Cu/low-k dielectric. A series of comprehensive parametric study on the recipes of input laser power, repetition rate, grooving speed, defocus amount and street index has been conducted to improve the quality of dicing process. The effects of the laser kerf geometry, grooving edge quality and defects are evaluated by using scanning electron microscopy (SEM) and focused ion beam (FIB). Experimental results have shown that the laser grooving technique is capable to improve the quality and yield issues on Cu/low-k wafer dicing process.
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Nonlinear Predictive Control of Active Four-wheel Steering Vehicles
Shuyou Yu,Wenbo Li,Baojun Lin,Yongfu Li,Hong Chen,Hongqing Chu,Jianhua Yu 제어·로봇·시스템학회 2023 International Journal of Control, Automation, and Vol.21 No.10
In order to improve the handling stability of active four-wheel steering vehicles, a nonlinear model predictive controller is presented, which can guarantee that the actual sideslip angle and yaw rate can track the ideal sideslip angle and the ideal yaw rate through control of the front and rear wheel angles. A nonlinear static tyre model connected with a linear dynamic model is adopted to describe the vehicle dynamics. Furthermore, the tyre model is replaced by a map in the optimization problem of nonlinear model predictive control. The introduction of maps can reduce the online computational time by a trade-off between the computational burden of CPU and the storage burden of ROM. Simulation results in CarSim indicate that the proposed controller can follow the outputs of the ideal reference model, reduce the computational burden, and improve the handling stability of the active four-wheel steering vehicles effectively.
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A new method of synthesis on high-quality AgGaS2 polycrystalline
Jianjun Zhang,Shifu Zhu,Beijun Zhao,Baojun Chen,Zhiyu He 한국물리학회 2010 Current Applied Physics Vol.10 No.2
High-pure, single-phase, free of voids and high mass density AgGaS2 polycrystalline was synthesized by a new method, i.e. two-temperature zone vapor-transporting together with the mechanical and melt temperature oscillation method (TVMMTOM), directly from high-purity (6 N) elements silver, gallium and sulfur with excess sulfur. The mechanism and advantages of the new method for synthesizing high-quality AgGaS2 were discussed. It is found that the polycrystalline material synthesized by the new method is superior to that synthesized by the conventional method, what is more the new method can avoid the explosion of the synthetic quartz ampoule. Adopting the modified Bridgman method an integral and crack-free AgGaS2 single crystal with diameter of 14 mm and length of 63 mm has been obtained. It was found that there was a (1 0 1) cleavage face and the four order X-ray spectrum of the {1 0 1} faces was observed. By the method of DSC analysis the melting and freezing points of the AgGaS2 single crystal were about 995 and 955 ℃. The transmission spectra of the AgGaS2 sample of 10 × 8 ×2㎣ were obtained by means of UV and IR spectrophotometer. The limiting wavelength was 470 nm and the band gap was 2.64 eV. It can be found in the infrared spectrum that the infrared transmission was above 55%from 4000 to 800 cm-1, and the infrared transmittance of the crystal is up to 63% at 10.6 lm, which is higher than that of the crystal grown using polycrystalline materials synthesized by the conventional method. The value of a in 10.6 lm was 0.267 cm-1. Above mentioned results showed that the crystal was of good quality and TVMMTOM is preferable for synthesizing high-quality AgGaS2 polycrystalline materials.
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