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평판형 유도결합 플라즈마 장치의 SiH<sub>4</sub>/H<sub>2</sub> 방전에 대한 공간 평균 전산모사
이원기,권득철,윤남식,Lee, Won-Gi,Kwon, Deuk-Chul,Yoon, Nam-Sik 한국진공학회 2009 Applied Science and Convergence Technology Vol.18 No.6
A global simulation of $SiH_4/H_2$ discharge is conducted in a planar-type inductively coupled plasma (ICP) discharge. We numerically solve a set of spatially averaged fluid equations for electrons, positive ions, negative ions, neutrals, and radicals. Absorbed power by electrons is determined by an analytic electron heating theory including the anomalous skin effect. Also, we investigate functional dependence of various discharge quantities such as the densities of various species and the temperature of electron on external controllable parameters such as ratio between $SiH_4$ and $H_2$, power and pressure. 평판형 유도결합 플라즈마 장치의 $SiH_4/H_2$ 방전에 대한 공간 평균 전산모사가 이루어졌다. $SiH_4/H_2$ 플라즈마 방전에서 발생되는 전자, 양이온, 음이온, 중성종, 그리고 라디칼들에 대한 공간 평균된 유체 방정식을 기반으로 하고 있으며, 비정상 표피효과(Anomalous skin effect)를 고려한 비충돌 전자가열 모델을 적용하여 흡수되는 파워량을 결정하였다. $SiH_4$와 $H_2$의 가스 주입비율, 파워, 그리고 압력을 변화시키며 각각에 대한 하전입자, 중성종 및 라디칼들의 밀도 변화와 전자온도 의존성을 조사하였다.
Chain orientation and Degradation Behavior of Poly[(R)-3-hydroxybutyrate] Lamellar Crystals
이원기,조남주,하창식,Lee, Won Gi,Jo, Nam Ju,Ha, Chang Sik Korean Chemical Society 2001 Bulletin of the Korean Chemical Society Vol.22 No.8
Topological changes caused by the alkaline and enzymatic attacks of solution-grown, chain-folded lamellar crystals (SGCs) of poly[(R)-3-hydroxybutyrate] P(3HB) have been studied in order to investigate the chain-folding structure in P(3HB) crystal regions. NaOH and an extracellular PHB depolymerase purified from Alcaligenes faecalis T1 were used for alkaline and enzymatic hydrolysis, respectively. The measurements were performed on crystals attached to a substrate which is inactive to degradation mediums. Both alkaline and enzymatic attacks lead to a breakup of the lamellar crystals along the crystallographic b-axis during initial erosion. Since hydrolysis preferentially occurs in amorphous regions, this morphological result reflects relatively loosely packed chains in core parts of lamellar crystals. Additionally, it was supported by the ridge formation along the b-axis in the lamellar crystals after thermal treatment at a low temperature because of the thermally sensitive nature of the loosely packed chains in lamellar crystals. However, the alkaline hydrolysis accompanied the chain erosions or scissions in quasi-regular folded lamellar surfaces due to smaller size of alkaline ions in comparison to the enzyme, resulting in the decrease of molecular weight.