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MOSFET 온도 및 발열 계측을 위한 가상 열 센서 기술 개발
안창욱(Chang-uk Ahn),오승인(Seungin Oh),김휘수(Hwi-Su Kim),박동일(Dong Il Park),김진균(Jin-Gyun Kim) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.11
This paper presents a model-based virtual thermal sensor to estimate the temperature and the heat source of MOSFET operating in enclosed spaces. It can estimate the temperature without the aid of the sensor installed inside. Direct thermal measurement is a difficult matter because the sensor cannot be attached to the required location due to various operating environments or geometric problems. Therefore, inverse heat conduction problems with very limited sensing information have been widely studied. The inverse heat conduction is categorized in an ill-posed problem, which implies that the estimation is extremely sensitive to measurement errors. To address this problem, we use a Tikhonov regularization method for stability. The developed virtual sensor successfully estimates the temperature and the heat source of MOSFET.