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원자층 증착공정의 뱅크 구조형 유연성 태양전지로의 응용
송근수(Gen-Soo Song),유경훈(Kyung-Hoon Yoo) 대한설비공학회 2010 대한설비공학회 학술발표대회논문집 Vol.2010 No.6
Aluminium-doped ZnO(AZO) is considered as an excellent candidate to replace indium tin oxide(ITO) as transparent conductive oxide(TCO) in solar cell devices. In the present study AZO thin film was applied to the fabrication of a bank-shaped flexible solar cell using a low temperature selective atomic layer deposition(ALD). AZO thin films were deposited on poly-ethylen-terephtalate(PEN) substrate at a deposition temperature of 130 ℃ using diethylzinc(DEZ) and trimethylaluminium(TMA) as precursors and H₂O as an oxidant. The structural and electrical properties of the AZO films were investigated.
반도체 클린룸용 배기 열회수식 에어와셔 시스템의 에너지 절감 수치해석
송근수(Gen-Soo Song),김형태(Hyoung-Tae Kim),유경훈(Kyung-Hoon Yoo) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.5
In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airbome gaseous contaminants such as NH₃, SOx and organic gases from the outdoor air introduced into clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is therefore useful for reducing the outdoor air conditioning load for a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. In the present study, numerical analysis and experiment was conducted to simulate the amount of energy reduction of exhaust air heat recovery type air washer system. The present numerical results showed good agreement with the results of the experimental data.
반도체 클린룸용 배기 열회수식 외기공조시스템의 에너지소비 수치해석
송근수(Gen-Soo Song),유경훈(Kyung-Hoon Yoo),김형태(Hyoung-Tae Kim) 대한설비공학회 2009 대한설비공학회 학술발표대회논문집 Vol.2009 No.-
In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as NH₃, SOx and organic gases from the outdoor air introduced into clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is therefore useful for reducing the outdoor air conditioning load for a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. In the present study, numerical analysis and experiment was conducted to simulate the amount of energy reduction of exhaust air heat recovery type air washer system. The present numerical results showed good agreement with the results of the experimental data.
정전효과가 있는 300 ㎜ 보다 큰 반도체 웨이퍼로의 입자침착 수치해석
송근수(Gen-Soo Song),유경훈(Kyung-Hoon Yoo) 대한설비공학회 2010 대한설비공학회 학술발표대회논문집 Vol.2010 No.6
Particle deposition on a semiconductor wafer larger than 300 mm was studied numerically. In particular the electrostatic effect on particle deposition velocity was investigated. The present numerical method took into consideration the particle transport mechanisms of convection, Brownian diffusion, gravitational settling and electrostaic attraction to characterize particle deposition on a horizontal semiconductor wafer under the laminar flow field. The averaged particle deposition velocities on the upper surface of the wafer were calculated from the particle concentration equation in the Eulerian frame of reference. It was observed from the numerical results that the electrostatic effect of wafer increased the particle deposition velocities. The comparison of the present numerical results with the available experimental data showed relatively good agreement between them.
반도체 클린룸용 배기 열회수식 에어와셔 시스템의 에너지절감에 관한 수치해석
송근수(Gen-Soo Song),김형태(Hyung-Tae Kim),유경훈(Kyung-Hoon Yoo),손승우(Seung-Woo Son),신대건(Dae-Kun Shin),김영일(Young-Il Kim) 대한설비공학회 2010 설비공학 논문집 Vol.22 No.10
In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.
송근수(Gen-Soo Song),유경훈(Kyung-Hoon Yoo),조병하(Byung-Ha Cho) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
Numerical analysis and experiment was conducted to investigate the atomic layer deposition(ALD) of silicon nitride using silicon tetrachloride and ammonia as precursors. The present study simulated the surface reactions for as-deposited Si₃N₄ as well as the kinetics for the reactions of SiCl₄ and NH₃ on the semiconductor wafer. The present study results showed that the ALD process is dependent on the activation constant. It was also shown that the low activation constant leads to the self-limiting reaction required for the ALD process. The comparison of the present numerical results with the present experimental results showed relatively good agreement between them. The inlet and wafer temperatures were 473 K and 823 K, respectively. The system pressure is 2 Torr.
반도체 클린룸용 배기 열회수식 외기공조시스템의 에너지절감에 관한 실험적 연구
송근수(Gen-Soo Song),유경훈(Kyung-Hoon Yoo),강신영(Shin-Young Kang),손승우(Seung-Woo Son) 대한설비공학회 2009 설비공학 논문집 Vol.21 No.5
In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of 1,000 ㎥/h that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.