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박창주(Chang Ju Park),문병필(Byung Phil Mun),유성근(Sung Keun Yoo),이성길(Sung-Kil Lee),양성(Sung Yang),이종현(Jong Hyun Lee) 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.6
This paper describes a diffuser-type polymeric micro pump with a hetero-shaped microfluidic channel for lab-on-a-chip(LOC) applications. The hetero-shaped micro fluidic channel is to generate the net flow by making difference in the fluidic resistance of input and output port. The channel consists of two regions with different cross-sectional shapes; a semi-circle (80 ㎛ in width) for input flow and a rectangle (200 ㎛ in width) for output flow. The micropump can be simply fabricated using polydimethylsiloxane(PDMS), which is widely used as a polymer material for microfluidic devices. Pneumatic pressure is periodically applied to the fabricated pump, which is evaluated in terms of duty ratio and frequency.
APCVD법을 사용한 보론 포스파이드의 증착 및 특성에 관한 연구
김순영,문병필,윤여철,전호승,김철주 서울시립대학교정보기술연구소 2001 정보기술연구소 논문집 Vol.3 No.-
Boron Phosphide films were deposited on the glass substrate at the low temperature, 550℃, by the reaction of B₂H_6 with PH₃ using CVD. N₂ was employed as carrier gas. The reactant gas rates were 50 ㎖/min for B₂H_6, 50 ㎖/min for PH₃ and 1.5ℓ/min for N₂. The films were annealed for 1hour, 3hours in N₂ambient at 550℃. The deposition rate was 1000Å/min and the refractive index of film was 2.6. The measurement of XRD shows that the films have the preferred orientation of (1 0 1). The data of VIS spectrophotometer show 75.49% for as-deposited, 76.71% for 1hr-annealed and 86.4 % for 3 hrs-annealed. The data of AFM show 73Å for as-deposited, 88.9Å for 1hr-annealed and 220Å for 3hrs-annealed. Also, The data of the secondary electron emission rate(γ) s how 0.317 for as -deposited, 0.357 for 1hr-annealed and 0.537 for 3hrs-annealed. And, The film shows the surface deposited thin film, bu using FT-IR, has the O-H bond and this bond is greatly decreased as annealing.