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레이저 직접 묘화 시스템의 에어리얼 이미지에 관한 연구
박종락,범태원,김영식,Tom D. Milster,박승태,권해혁 조선대학교 공학기술연구원 2022 공학기술논문지 Vol.15 No.4
We studied the aerial image of an laser direct writing system. An analytical expression for the pixel image was introduced and a concise formula for the aerial image of the system was presented. Simulations of a sawtooth pattern having various period values were performed. The aerial image contrast was obtained as a function of the sawtooth pattern period. It was found that the shorter the period, the worse the aerial image contrast. For sawtooth pattern periods larger than 84.0 ㎛ (40-pixel), the image contrast was greater than 0.9, while for sawtooth pattern periods smaller than 10.5 ㎛ (5-pixel), the image contrast was lower than 0.5
Analysis of a Laser Direct Writer with an Acousto-optic Modulator Employed for Dose Gray-scaling
박종락,Youngsik Kim,Tom D. Milster 한국물리학회 2011 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.59 No.51
We have studied a laser direct writing system for the fabrication of gray-scale diffractive optic elements in terms of its system characteristic curve that can be understood as a composite function of a characteristic curve for an acousto-optic modulator employed for dose gray-scaling and that for a photoresist used for continuous profile formation. A mathematical analysis method was developed and applied to retrieve the two constituent characteristic curves for the acousto-optic modulator and the photoresist from the system characteristic curves. The validity of the results was confirmed through comparison with direct measurements.