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        Growth of ZnO Thin Films by Using MOCVD with a High-Speed Rotating Disk Reactor

        Naoki Nishimoto,Obuliraj Senthilkumar,Takahiro Yamamae,Kasilingam Senthilkumar,Yasuhisa Fujita 한국물리학회 2008 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.53 No.5

        ZnO thin films were grown by using MOCVD with separated nozzles and a vertical-type highspeed rotating disk reactor. The interaction between source gases is prevented by the separated nozzles. The high-speed disk rotating system realized laminar flow by suppressing the thermallyinduced buoyancy flow, and it will be possible to inhibit the oxygen vacancies because the source gases are attracted on the substrate by the centripetal force. High thickness uniformity of below 2.0 % variation was obtained in 2-inch-diameter wafers. The results of the photoluminescence and the Hall-effect easurements were compared to the results obtained for conventional orizontal-type reactor and showed a suppression of the green emission band and of the carrier concentration, which shows the advantage of the high-speed rotating disk reactor.

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        UV-Blue Light Emission from ZnO Nanoparticles

        Obuliraj Senthilkumar,Kazuki Yamauchi,Kasilingam Senthilkumar,Takahiro Yamamae,Yasuhisa Fujita,Naoki Nishimoto 한국물리학회 2008 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.53 No.1

        Gas evaporation was employed to prepare nitrogen-doped ZnO nanoparticles, which showed in- tense UV/blue emission (380 nm) at room temperature. The thin lms were deposited by dip coating with nanoparticles dispersed in isopropanol and water. The PL spectrum showed dominant acceptor bound excitons around 371 nm at low temperatures, which was due to the substitution of nitrogen acceptors in oxygen sites. Nitrogen doping was also conrmed from Raman spectroscopy, which showed a nitrogen-related local vibrational mode (LVMN) at 583 cm-1. Gas evaporation was employed to prepare nitrogen-doped ZnO nanoparticles, which showed in- tense UV/blue emission (380 nm) at room temperature. The thin lms were deposited by dip coating with nanoparticles dispersed in isopropanol and water. The PL spectrum showed dominant acceptor bound excitons around 371 nm at low temperatures, which was due to the substitution of nitrogen acceptors in oxygen sites. Nitrogen doping was also conrmed from Raman spectroscopy, which showed a nitrogen-related local vibrational mode (LVMN) at 583 cm-1.

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