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Manju Pandey,Prabhash Mishra,Debdulal Saha,K. Sengupta,S. S. Islam 대한금속·재료학회 2014 ELECTRONIC MATERIALS LETTERS Vol.10 No.2
Porous alumina thin film has been investigated in order to find its sensitivity in the trace moisture level. Alumina, with two different phases were obtained using sol-gel process and fired between 400°C to 1000°C. FESEM, BET, AFM and XRD techniques were employed for microstructural characterization of the sintered thin film in two phases. A detailed analysis is done to assess the superiority of gamma (γ) - over alpha (α) phase using impedance spectroscopy. It was observed that gamma phase is more sensitive towards trace level moisture sensing.