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남명우,홍미란,남태철 ( Myungwoo Nam,Meeran Hong,Taechul Nam ) 한국센서학회 1996 센서학회지 Vol.5 No.2
We have fabricated the vacuum magnetic sensor with a lateral field emitter arrays constructed on n-Si substrate, and investigated its magnetic chracteristics. The device consists of 100 field-emitter tips with a 10 fan pitch, gate, and split-anodes which are laterally structured. `the electron-emission characteristics from the emitter followed the Fowler-Nordheim tunnelling theory. `The sensor has good linear characteristics and high sensitivity of 825 %/T.