http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
SENSITIVIY OF A NANOCANTILEVER-BASED MASS SENSOR
K. PRABAKAR,J. JAYAPANDIAN,A. K. TYAGI,C. S. SUNDAR,BALDEV RAJ 성균관대학교(자연과학캠퍼스) 성균나노과학기술원 2010 NANO Vol.5 No.1
In the present work, mass and position sensitivity of a nanocantilever is simulated using finite element analysis. Changes in resonant frequency of various modes of a polysilicon cantilever, with a gold coating of different thickness, area, and spatial distribution is simulated. It is found that for a uniform increase in gold coating thickness, torsional mode gives an order higher mass sensitivity than vertical bending and lateral bending modes. In other cases, sensitivity is highly dependent on the position of the coating and is explained on the basis of flexural rigidity. Apart from this, simulations were performed for a point mass (gold cube) loading at various positions along the length and width axis of the cantilever. Further, for localized mass loading, cantilever was tailored for enhanced sensitivity. It is found that by introducing a step discontinuity in thickness of the cantilever, the mass sensitivity increases by two orders of magnitude and it depends on the position of step from free end, step thickness, and step width.