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      저자 : Heon-JuLee (검색결과 2 건)
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        Chemical Bond Structure on Si-O-C Composite Films with a Low Dielectric Constant Deposited by Using Inductively Coupled Plasma Chemical Vapor Deposition

        Shou-YongJing,Heon-JuLee,ChiKyuChoi 한국물리학회 2002 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.41 No.5

        Si-O-C composite films were deposited on p-type Si(100) substrates by using inductively coupled plasma chemical vapor deposition with a mixture of a bis-trimethylsilymethane (BTMSM) precursor gas and oxygen. The BTMSM and O2 gases were fully dissociated, and an electron density and an electron temperature of about 1012 cm-3 and 1.6 eV, respectively, were obtained at low pressures (<320 mTorr) when the rf power was about 300 W. Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy were used to investigate the bonding configurations, Si-O-Si, Si-O-C, Si-CH3; and OH-related bonds, in the films. The film annealed at 500 oC in a vacuum showed a re-arrangement of the chemical bonds in the Si-O-C composite film, and some of Si-O-Si open links were changed into ring links. Therefore, a nanopore structure was formed within the Si-O-C composite film, and as a result, the dielectric constant decreased. The lowest dielectric constant achieved was 2.3.

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        Optimisation of cold cathode ion source model

        G.E.Bugrov,S.K.Kondranin,E.A.Kralkina,V.B.Pavlov,D.V.Savinov,K.V.Vavilin,Heon-JuLee 한국물리학회 2003 Current Applied Physics Vol.3 No.6

        This paper represents the results of the optimisation of cold cathode ion source model with 5 cm extraction aperture diameter. Inthis model, the glow discharge is utilised for generation of electrons in the cathode of the ion source. The various models withdierent lengths of cathode and anode are tested. The shortest model with 4.5 cm in length of cathode and anode each showssatisfactory operation and can be used in cases when the high values of extracted ion current are not required. The best model fromthe point of view of ion beam current value and eciency of the discharge is the model with cathode length of 7 cm and anode lengthof 7 cm. In this case, the obtained maximum ion beam current is 110 mA when the discharge current is 1000 mA. In case whenmoderate values of extracted ion beam current are necessary, it is possible to operate the ion source even without the anode magneticsystem.. 2003 Elsevier B.V. All rights reserved.

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