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        Fabrication and Characterization of Perovskite (Bi,Sm)(Ni,Ti)O3 Thin Films by Rf Magnetron Sputtering

        Hideto Tada,Masafumi Kobune,Koji Fukushima,Hisashi Oshima,Daisuke Horit,Akihiro Tamura,Yusuke Daiko,Atsushi Mineshige,Tetsuo Yazawa,Hironori Fujisawa,Masaru Shimizu,Hideshi Yamaguchi,Koichiro Honda 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.55 No.2

        The structural characteristics, the mechanism of crystal growth, and the ferroelectric properties of partially Sm-substituted perovskite bismuth-samarium-nickel-titanate [(Bi1−xSmx)(Ni0.5Ti0.5)- O3; BSNT, x = 0− 0.9] thin films deposited on Pt(100)/MgO(100) substrates by rf sputtering have been investigated using X-ray diffraction, transmission electron microscope, and polarization - electric field hysteresis loop measurements. The fabricated BSNT samples with x≥0.6 were confirmed to have a single-phase perovskite structure. Of the four samples (x = 0.6 0.7, 0.8, and 0.9) with a single-phase perovskite structure, the c-axis-oriented epitaxial BSNT film with x = 0.9 exhibited the best hysteresis loop, with a remanent polarization of 2 μC/cm2 and a coercive field of 100 kV/cm. The structural characteristics, the mechanism of crystal growth, and the ferroelectric properties of partially Sm-substituted perovskite bismuth-samarium-nickel-titanate [(Bi1−xSmx)(Ni0.5Ti0.5)- O3; BSNT, x = 0− 0.9] thin films deposited on Pt(100)/MgO(100) substrates by rf sputtering have been investigated using X-ray diffraction, transmission electron microscope, and polarization - electric field hysteresis loop measurements. The fabricated BSNT samples with x≥0.6 were confirmed to have a single-phase perovskite structure. Of the four samples (x = 0.6 0.7, 0.8, and 0.9) with a single-phase perovskite structure, the c-axis-oriented epitaxial BSNT film with x = 0.9 exhibited the best hysteresis loop, with a remanent polarization of 2 μC/cm2 and a coercive field of 100 kV/cm.

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