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- 저자 : 한규범(Gue-Bum Han) (검색결과 2 건)
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전기화학적 에칭법을 이용한 AFM용 텅스텐 탐침 제작에 관한 연구
한규범(Gue-Bum Han),장현아(Hyuna Jang),안효석(Hyo-Sok Ahn) 한국트라이볼로지학회 2013 한국트라이볼로지학회지 (Tribol. Lubr.) Vol.29 No.4
As commercial atomic force microscopy (AFM) probes made of Si and Si3N4 have low stiffness, it is difficult to induce sufficient elastic deformation on the surface of a specimen in a tapping mode. Therefore, high-guality phase contrast images can not obtained. On the other hand, a tungsten AFM probe has relatively higher stiffness than a commercial AFM probe. Accordingly, it is expected to provide an enhanced phase contrast image, which is an effective tool for achieving a better understanding of the micromechanical properties of worn surfaces and wear mechanisms. In this study, on electrochemical etching method was optimized to fabricate tungsten probe tips for an AFM. Electrochemical etching was performed by applying pulse waves with a 20% duty cycle at various voltages instead of only a DC voltage, which has been commonly used.
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서브 마이크로 구조를 가진 실리콘 표면의 마찰 특성 연구
한지희(Ji-Hee Han),한규범(Gue-Bum Han),장동영(Dong-Yong Jang),안효석(Hyo-Sok Ahn) 한국트라이볼로지학회 2017 한국트라이볼로지학회지 (Tribol. Lubr.) Vol.33 No.3
The understanding of the friction characteristics of micro-textured surface is of great importance to enhance the tribological properties of nano- and micro-devices. We fabricate rectangular patterns with submicron-scale structures on a Si wafer surface with various pitches and heights by using a focused ion beam (FIB). In addition, we fabricate tilted rectangular patterns to identify the influence of the tilt angle (45° and 135°) on friction behaviour. We perform the friction test using lateral force microscopy (LFM) employing a colloidal probe. We fabricate the colloidal probe by attaching a 10±1-μm-diameter borosilicate glass sphere to a tipless silicon cantilever by using a ultraviolet cure adhesive. The applied normal loads range between 200 nN and 1100 nN and the sliding speed was set to 12 μm/s. The test results show that the friction behavior varied depending on the pitch, height, and tilt angle of the microstructure. The friction forces were relatively lower for narrower and deeper pitches. The comparison of friction force between the sub-micro-structured surfaces and the original Si surface indicate an improvement of the friction property at a low load range. The current study provides a better understanding of the influence of pitch, height, and tilt angle of the microstructure on their tribological properties, enabling the design of sub-micro- and micro-structured Si surfaces to improve their mechanical durability.
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