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곽동주,하양진,신용섭,최연석 한국전기전자재료학회 1998 전기전자재료학회논문지 Vol.11 No.3
In the present study the glow discharge characteristics of $CO_2$ in a parallel plate electrode system were investigated, and the decomposition properties of $CO_2$ concerned with the discharge characteristics were discussed. The results show that $CO_2$ concentration decreases with increase in discharge power and decrease in gas pressure. The maximum conversion of $CO_2$ by glow discharge was 52% under the conditions of gas pressure, 10m Torr and 290W of discharge power.