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Hydroxyapatite 계 세라믹스의 감습특성에 관한 연구
육재호,조기선 ( Jae Ho Yuk,Ki Sun Cho ) 한국센서학회 1997 센서학회지 Vol.6 No.1
Ca_(10)(PO₄)_6(OH)₂ humidity-sensitive devices were fabricated by a solid reaction method, and He humidity-sensitive characteristics were investigated. The impedance decreases with increasing relative humidity, and the good sensitivity is shown in which impedance changes by about 10²Ω over the region of 30∼90 %. Also, It is shown that the humidity sensitivity is stable in temperature variations and long time exposures to the humidity. The sensitivity of the specimens is not affected by a heat treatment, and the hysteresis in one humidity cycle is negligible.