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차량용 고 분해능 디지털 MEMS 가속도센서 시스템 IC 개발
유광호(Kwangho Yoo),고형호(Hyoungho Ko),이아라(Ahra Lee),임재상(Jaesang Lim),이상윤(Sang-Yoon Lee),정덕균(Deog-Kyoon Jeong),박민하(Minha Park),장현수(Hyunsu Jang),이정표(Jeongpyo Lee),조동일(Dong-il Dan Cho) 한국자동차공학회 2006 한국자동차공학회 Symposium Vol.- No.-
This paper presents design, fabrication and measurement of a high resolution digital microelectromechanical systems (MEMS) accelerometer system IC. This system IC consists of a MEMS sensing element and a high resolution digital readout circuit. The MEMS sensing element is fabricated using the sacrificial/bulk micromachining (SBM) process. In order to protect the sensing element from environmental changes, wafer level hermetic packaging(WLHP) process is performed. The developed readout circuit offers 32-bit resolution using an 1-bit, 4th-order ΣΔ modulator and a digital decimator/demodulator. The proposed system IC provides a 128-㎐, 32-bit digital output with ±5g dynamic range, 0.52% nonlinearity, and 1.6*10? count/g scale factor.