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- 저자 : 이창린(Chang-Lin Lee) (검색결과 1 건)
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고정밀 회전 및 축방향 이송을 위한 신개념 원통형 자기부상 스테이지
전정우(Jeong-Woo Jeon),MiticaCaraiani,이창린(Chang-Lin Lee),정연호(Yeon-Ho Jeong),김종문(Jong-Moon Kim),오현석(Hyeon-Seok Oh),김성신(Sungshin Kim) 대한전기학회 2012 전기학회논문지 Vol.61 No.12
In this paper, a conceptual design and a detailed design of novel cylindrical magnetic levitation stage is introduced. This is came from planar-typed magnetic levitation stage. The proposed stage is composed of cylinder-typed permanent magnet array and semi-cylinder-typed 3 phase winding module. When a proper current is induced at winding module, a magnetic levitation force between the permanent magnet array and winding module is generated. The proposed stage can precisely move the cylinder to rotations and translations as well as levitations with the magnetic levitation force. This advantage is useful to make a nano patterning on the surface of cylindrical specimen by using electron beam lithography under vacuum. Two methods are used to calculate required magnetic levitation forces. The one is 2D FEM analysis, the other is mathematical modeling. This paper shown that results of two methods are similar. An assistant plate is introduced to reduce required currents of winding module for levitations in vacuum. The mathematical model of cylindrical magnetic levitation stage is used for dynamic simulation of magnetic levitations. A lead-lag compensator is used for control of the model. Simulation results shown that the detail designed model of the cylindrical magnetic levitation stage with the assistant plate can be controlled very well.
ScienceON
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