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MEMS 정전형 회전 액추에이터를 위한 무향칼만필터 기반 회전각 추정
우제민(Jemin Woo),한봉수(Bongsu Hahn),안창선(Changsun Ahn) 대한기계학회 2020 대한기계학회 춘추학술대회 Vol.2020 No.12
The capacitance of the MEMS electrostatic rotary actuator and the angle of the rotor have a fringe effect and large non-linearity that cannot be ignored. Therefore, the rotation angle estimation is not as simple as that based on a simple flat capacitor model. In addition, since the electrodes must perform driving and sensing at the same time, a method of coupling is required. In this paper, a capacitance model is derived as a data-based model that effectively expresses nonlinear capacitance with sufficient accuracy. Also, by separating the driving and sensing electrodes, high measurement accuracy is possible. UKF is used to consider the nonlinear measurement model, and the estimated angle shows high accuracy. The proposed method can be applied to a similar system with nonlinear capacitance.