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DLC 박막의 증착에 의한 Ge window의 적외선 투과 특성 향상
엄현석,이재엽,박진석,박성래 漢陽大學校 工學技術硏究所 1998 工學技術論文集 Vol.7 No.1
As an antireflection layer, the thin film of diamond-like carbon(DLC) is deposited on a commercially used Ge window by using an rf(13.56 MHz) plasma CVD. Optimal values of thickness and refractive index of the DLC film for ideal antireflection have been determined by performing the computer simulation. The IR-transmittance characteristic of the DLC-coated Ge window is analyzed by using an FTIR measured in the wavelength range of 2.5 ∼ 25 μm, By coating the DLC film on one side of the Ge window, the transmittance measured at a wavelength of 10 μm is observed to be about 60 %, while that of the bare Ge is lower than 50 %. The loss of the transmittance has been explained by considering the variation of refractive indices and the absorption of the incident IR in the DLC layer. It has also been observed that a higher transmittance of about 90 % can be obtained by coating the DLC film on both sides of the window.