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YSZ 고체 산화물 연료전지 전해질의 ALD 박막 성장 및 특성 분석
손경식(Kyung Sik Son),배기호(Kiho Bae),심준형(Joon Hyung Shim),배민영(Min Yung Bae),하정숙(Jung Suk Ha) 대한기계학회 2011 대한기계학회 춘추학술대회 Vol.2011 No.10
In this study, we have synthesized yttria stabilized zirconia (YSZ) in nanoscale through atomic layer deposition (ALD). Composition of the films has been analyzed by the energy-dispersive spectroscopy and the auger electron spectroscopy. The compositional analysis confirmed that doping concentration of ALD YSZ can be controlled by adjusting zirconium and yttrium source pulsing cycles. The electrochemical ion spectroscopy analysis has been used for measurement of ionic conductivity of the ALD YSZ films.