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펨토초 레이저를 이용한 은 나노 와이어 필름 전기적 절연
윤지욱(Ji Wook Yoon),박정규(Jung Kyu Park),다니엘뵈머(Daniel Boehme),세바스찬잰더(Sebastian Zander),조성학(Sung Hak Cho) Korean Society for Precision Engineering 2012 한국정밀공학회지 Vol.29 No.3
Electrical isolation of Ag nanowire, which is one of the candidates as electrode for display devices, on polymer with femtosecond pulse laser has been investigated. Line patterning to Ag nanowire with various pulse energy and scan speed were experimented. Duo to the results of the line patterning experiment, we fabricated the isolated squares and measured electrical resistance. The profile of the selectively ablated area was analyzed with AFM(Atomic Force Microscope). The width of the patterned line was 1.8 ㎛ and the depth was 1.6 ㎛. We demonstrated electrical isolation of the Ag nanowire using femtosecond laser by evaluating the electrical resistance of the sample between isolated and opened area.