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        플라즈마 진단을 위한 이온에너지 분석장치의 제작 및 특성 조사

        김계령,김완,이용현,강희동 ( Kye Ryung Kim,Wan Kim,Yong Hyun Lee,Hee Dong Kang ) 한국센서학회 1998 센서학회지 Vol.7 No.3

        An ion energy spectrometer which has the 45° parallel electrostatic deflection plate was designed and constructed for measuring ion temperature in high temperature plasma. The energy calibration and the energy resolution were studied in detail for a hydrogen ion at the 0.24∼1.92keV energy using electrostatic accelerator with a duoplasmatron ion source. The voltage of the deflection plate was linearly increased for the decreased ion detector position at the constant ion energy and decreased for the increased ion energy at the fixed ion detector position. The inclination of the deflection plate voltage to the ion energy was between 0.92 and 1.61, and linearly decreased for the increased the ion detector position. The measured energy resolution, which is 4.2 % ∼ 11.6 % in this experiment region, was improved for the insreased ion dector position and ion energy. The relative efficiency was increased for the decreased the ion detector posotion. The ion energy spectrum of the DC plasma in the multi-purpose plasma generator was measured using this equipment. The ion temperature was 203-205 eV at the discharge voltage 320 V, discharge current 1.7 A.

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        종성입자 에너지 분석장치에서 전하교환용 탄소박막에 의한 수소원자의 에너지 손실특성

        이용현 ( Yong Hyun Lee ),강희동 ( Hee Dong Kang ),김계령 ( Kye Ryung Kim ),김완 ( Wan Kim ) 한국센서학회 1998 센서학회지 Vol.7 No.3

        A neutral particle energy analyzer, which has the carbon stripping foil and the 90° cylindrical electrostatic deflection plate, was designed and constructed for measuring of ion temperature in plasma. The energy calibration and energy resolution were studied in detail for a hydrogen ion at the 0.5∼3.0 keV energy using a duoplasmatron ion source. An energy of hydrogen ion to the deflection plate voltage at the peak ion count rate could be fitted by the expression E_o(keV)=.3.83%(kV). The measured energy resolution, which was about 2% at the energy of 3.0 keV and 9% at the energy of 0.5keV, was better for the increased hydrogen ion energy. For the charge exchanged hydrogen atom due to the carbon stripping foil, the energy calibration, energy loss and resolution were measured to the 0.5∼2.0㎍/㎠ thickness of the carbon stripping foil. An energy of the charge exchanged hydrogen atom as a function of the deflection plate voltage and carbon foil thickness could be fitted by the expression E_o(keV)=(0.53d+4.4)·V(kV). The energy loss was 0.230.89 keV to the 0.5∼2.0㎍/㎠ carbon foil thickness and the 0.5∼3.0 keV energy of the incident neutral hydrogen atom, it could be fitted by the expression △E=(0.12d-0.27)·E_o^½(keV). The measured energy resolution for the neutral hydrogen atom, which was between 7 % and 35% in this experiment region, was increased for the increasing neutral hydrogen atom energy and the decreasing carbon stripping foil thickness.

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