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홍진수(Chinsoo Hong),김창교(Chang-Kyo Kim),이병욱(Byoung-Wook Lee),이명래(Myoung-Rae Lee) 제어로봇시스템학회 2008 제어·로봇·시스템학회 논문지 Vol.14 No.4
The LGP with nanometer structures resulted in enhancement of optical efficiency. Its fundamental mechanism is to recycle the polarized light via one round-trip through QWP(Quarter-Wave Plate) but the maximum efficiency to reach with this method is limited up to 2. To get the larger efficiency than this limited one a LGP with nanometer-patterned grating is suggested. For its optimum design the computer simulation is performed and suggests a grating that the spatial frequency between adjacent patterns is 500nm, its height 250nm, duty cycle 50%, and its cross section is rectangular. On the basis of simulation results the LGP with nanometer-patterned grating is fabricated and its optical properties such as angular intensity distribution and CIE color coordinates are characterized. The angles of transmitted light are nearly the same as the results expected from the generalized Snell"s law. Thus the Mathematica code, developed in this experiment, will be applied to designing the optimized LGP. The LGP with nanometer-patterened grating shows the enhancement of transmitted intensity distribution up to 4.9 times.
Song, Young Soo,Chung, Chee Won 한국화학공학회 2003 Korean Journal of Chemical Engineering Vol.20 No.6
High density plasma etching of polysilicon thin films was carried out in an inductively coupled plasma (ICP) for the formation of nanometer-sized patterns. The etch rate and etch selectivity of polysilicon films were investigated as a function of the concentration of Cl₂ and HBr etch gases. The fast etch rate of polysilicon films was obtained in Cl₂/Ar gas, and the high selectivity of polysilicon to photoresist was found in HBdAr gas. Finally, the etching of polysilicon films masked with photoresists was attempted in HBdAr and Cl₂/Ar gases. The good pattern profile of polysilicon films with 60 nm lines was achieved in an HBdAr plasma.
홍진수(ChinSoo Hong),김창교(Chang-Kyo Kim),이병욱(Byoung-Wook Lee),김경래(Kyoung-Rae Kim) 제어로봇시스템학회 2008 제어·로봇·시스템학회 논문지 Vol.14 No.6
The LGP with nanometer structures resulted in enhancement of optical efficiency. Its fundamental mechanism is to recycle the polarized light via one round-trip through QWP(Quarter-wave Plate) but the maximum efficiency to reach with this method is limited up to 2. To get the larger efficiency than this a LGP with 1D PC( one-dimensional photonic crystal) nanometer-patterned on its top and bottom surfaces is suggested. For its optimum design the computer simulation is performed and suggests a grating that the spatial frequency between adjacent patterns is 500nm, its height 250nm, duty cycle 50%, and its cross section is rectangular. The angles of transmitted light are nearly the same as the results expected from the generalized Snell’s law. Thus the Mathematica code, developed in this experiment, will be applied to designing the optimized LGP. The LGP with nanometer-patterened 1D PC LGP on its both surfces shows the enhancement of transmitted intensity distribution up to 5.7 times.