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Analysis of a Laser Direct Writer with an Acousto-optic Modulator Employed for Dose Gray-scaling
박종락,Youngsik Kim,Tom D. Milster 한국물리학회 2011 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.59 No.51
We have studied a laser direct writing system for the fabrication of gray-scale diffractive optic elements in terms of its system characteristic curve that can be understood as a composite function of a characteristic curve for an acousto-optic modulator employed for dose gray-scaling and that for a photoresist used for continuous profile formation. A mathematical analysis method was developed and applied to retrieve the two constituent characteristic curves for the acousto-optic modulator and the photoresist from the system characteristic curves. The validity of the results was confirmed through comparison with direct measurements.