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Process Optimization for High Frequency Performance of InP-Based Heterojunction Bipolar Transistors
Song, Yongjoo,Jeong, Yongsik,Yang, Kyounghoon The Institute of Electronics and Information Engin 2003 Journal of semiconductor technology and science Vol.3 No.1
In this work, process optimization techniques for high frequency performance of HBTs are presented. The techniques are focused on reducing parasitic base resistance and base-collector capacitance, which are key elements determining the high frequency characteristics of HBTs. Several fabrication techniques, which can significantly reduce the parasitic elements of the HBTs for improved high frequency performance, are proposed and verified by the measured data of the fabricated devices.