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마름모형 AFM 캔틸레버를 이용한 고분자 나노섬모의 점착력 측정
이학주(H-J Lee),조기호(K-H Cho),김재현(J-H Kim),유영은(Y-E Yoo),김완두(W-D Kim),김종만(J-M Kim),김용권(Y-K Kim),백창욱(C-W Baek) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
In the previous works, the success of rhombus-shaped AFM cantilever manufactured by standard MEMS process has been already proved by performing mechanical bending tests at a micro/nano-scale. In this paper, nano-newton scale adhesive force between micro/nano hair structure and silicon tip is measured by AFM at the atmospheric condition. A nano-hair structure of cyclic olefin copolymer (COC) is fabricated using an anodized aluminum oxide template. The diameter and the length of the nano-hair are approximately 150 ㎚ and 10 ㎛, respectively. This paper outlines a research process that encompasses: 1) design and fabrication of a symmetric rhombus-shaped AFM cantilever, 2) fabrication process of a polymeric nano-hair structure, and 3) adhesion test of nano-hair structure using the manufactured cantilever.
박익근,김용권,Park, I.K.,Kim, Y.K. 한국생산제조학회 2010 한국생산제조학회지 Vol.26 No.2
In this paper, study on the mode characteristics analysis of the SH-EMAT (shear horizontal, electromagnetic acoustic transducer) waves for evaluating the thickness reduction in plates such as corrosion and friction is presented. Noncontact methods for ultrasonic wave generation and detection have been a great concern and highly demanded due to their capability of wave generation and reception on surface of high temperature or on rough surface. Mode identification of the SH-EMAT wave is carried out in an aluminum plate with thinning defects using time frequency analysis method such as wavelet transform, compared with theoretically calculated group velocity dispersion curve. The changes of various wave features such as the amplitude and the time-of-flight have been observed and the correlations with the thickness reduction have been investigated. Firstly, experiments have been conducted to confirm that it is possible to selectively generate and receive specific desired SH modes. These modes have then been analyzed to select the parameters that are sensitive to the thickness change. The results show that the mode cutoff and the time-of-flight changes are feasible as key parameters to evaluate the thickness reduction.
Design and fabrication of 2-DOF scanning mirror with Polydimethylsiloxane sloped electrode
J.Y. Jin(진주영),J.H. Park(박재형),B.W. Yoo(유병욱),Yun-Ho Jang(장윤호),I.H. Park(박일흥),Y.K. Kim(김용권) 대한전기학회 2009 대한전기학회 학술대회 논문집 Vol.2009 No.7
In this paper, we present a simple fabrication process for sloped electrodes in 2-degree of fredom(DOF) scanning micromirror employing pholydimethylsiloxane(PDMS). Using this process, quasi-conic figure electrode is successfully fabricated on the substrate. Simulation results show sloped electrodes decrease actuation voltage down to 22% compared with parallel plate type of electrodes having the same electrode area.
박익근(I. K. Park),김용권(Y. K. Kim) 한국생산제조학회 2010 한국생산제조학회지 Vol.19 No.2
In this paper, study on the mode characteristics analysis of the SH-EMAT (shear horizontal, electromagnetic acoustic transducer) waves for evaluating the thickness reduction in plates such as corrosion and friction is presented. Noncontact methods for ultrasonic wave generation and detection have been a great concern and highly demanded due to their capability of wave generation and reception on surface of high temperature or on rough surface. Mode identification of the SH-EMAT wave is carried out in an aluminum plate with thinning defects using time frequency analysis method such as wavelet transform, compared with theoretically calculated group velocity dispersion curve. The changes of various wave features such as the amplitude and the time-of-flight have been observed and the correlations with the thickness reduction have been investigated. Firstly, experiments have been conducted to confirm that it is possible to selectively generate and receive specific desired SH modes. These modes have then been analyzed to select the parameters that are sensitive to the thickness change. The results show that the mode cutoff and the time-of-flight changes are feasible as key parameters to evaluate the thickness reduction.