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Characteristic of SiC Slurry in Ultra Precision Lapping of Sapphire Substrates
Tao Yin,ZhiDa Wang,Toshiro Doi,Syuhei Kurokawa,Zhe Tan,XiaoKang Ding,Huan Lin 한국정밀공학회 2021 International Journal of Precision Engineering and Vol.22 No.6
A method is proposed in this paper to prepare a SiC slurry with SiC particles selected by an ultrasonic-assisted elutriation method to reduce substrate surface damage caused by abrasive particles during lapping. Sapphire substrate lapping experiments were carried out using the prepared SiC slurry, and the lapping performance of the slurry was analyzed. The experimental results show that the SiC particle size is a factor that directly affects the material removal rate and surface roughness Ra, of sapphire substrates. When a SiC slurry with a particle size of 630 nm was used, the material removal rate was 508 nm/h, and the surface roughness Ra was 1.9 nm; increasing the slurry concentration and the platen rotating speed can improve the material removal rate. In addition, the agglomeration of SiC particles in the slurry depends on the pH of the slurry. Efficient precision lapping of sapphire substrates can be achieved by selecting appropriately sized SiC particles and by adjusting the slurry pH to control the agglomeration and dispersion of SiC particlesto further reduce the scratches on the substrate surface during the lapping process.
문성민(Sung-Min Moon),강재화(Jae-Hwa Kang),키도히로미쯔(Hiromitsu Kido),구로가와슈헤이(Syuhei Kurokawa),류성기(Sung-Ki Lyu) 한국기계가공학회 2012 한국기계가공학회지 Vol.11 No.1
Gears are reliable and efficient power transmission elements. They have been widely used in all kinds of machinery. Nowadays, resource conservationㆍenergy conservationㆍenvironmental improvements from the request of the compact, light weight, high efficiency, low costㆍHigher efficiency is required. Tooth root and bottom profiles of cylindrical gears affect bending fatigue life, but they are hard to measure with conventional gear measuring machine(GMM), because GMM is normally customized to measure only gear working flanks. The authors try to develop a new type of GMM by installing an extra 3D scanning probe and control software to measure tooth root and bottom profiles. First, in order to measure in various directions, a 3D scanning probe has been attached to the GMM developed. Next, calibration algorithm has been developed. Deviations of the calibration results are measured and it is found that systematic error must be caused by heat from driving motors. A new alternative GMM with driving motors generating less heat was designed and two GMMs are compared. Finally, 3 Dimension measurement of tooth root and bottom profiles of cylindrical gears is described.