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Shixiang Su,Ning Dai,Xiaosheng Cheng,Xin Zhou,Lei Wang,Herminso Villarraga-Gómez 한국정밀공학회 2020 International Journal of Precision Engineering and Vol.21 No.4
Industrial X-ray Computed Tomography (XCT) is one of the available choices for measuring parts’ internal and externalgeometries. However, there are still several challenges that limit the current XCT technologies from being widely spread asa dimensional metrology tool. In the study presented in this paper, multi-sphere standards were developed and used for theevaluation of the accuracy of dimensional measurements performed with an open-ended 450 kV XCT system of 0.4 mmfocal spot. Normally, the multi-sphere standard refers to a combination of several ball rods of various heights, where a ‘ballrod’ is understood as a ruby sphere mounted on a rod that is usually made of carbon fi ber or ceramic. The main purpose wasto determine if the rod’s material, the spatial distribution of the ruby spheres, and/or the selection of test lengths (i.e., thecenter-to-center distance between two ruby spheres) infl uence the determination of the maximum permissible sphere distanceerror ( MPE SD ) attributable to XCT data. The experimental data suggested ceramic is more suitable as a rod material thancarbon fi ber, and also, the spatial distribution of the ruby spheres has no obvious infl uence on the accuracy evaluation ofdimensional measurements. However, the selection of test lengths will signifi cantly aff ect the accuracy evaluation results. In particular, the results of dimensional measurements showed that the evaluation of the MPE SD with multi-sphere standardsfor the XCT system used in this study can be expressed as MPE SD = ± (159 + L/800) μm.